A position-sense interface with improved transfer characteristics. Electrical position detection circuitry, which may be substantially time-multiplexed or frequency-multiplexed, comprises a differential charge
integrator with input-sensed output-driven
common mode feedback. By placing sense capacitors in the
feedback loop of said differential charge
integrator with input-sensed output-driven
common mode feedback, improved position sensing
linearity is attained. In some embodiments of the invention, a compensating charge is applied to the sense capacitors in a fashion that minimizes the output common mode shift of the opamp. The magnitude of the compensating charge may be preset at a substantially constant level, or derived by a
feedback loop that measures the shift in output common mode
voltage in response to an
excitation signal and adjusts the magnitude of the compensating charge to drive said shift towards zero.The invention has numerous advantages for acceleration measurement in both open-loop and force-balanced accelerometers, as well as rotation
rate measurement in a vibratory rate
gyroscope. Other applications in which the invention may prove advantageous include:
motion detection for an oscillation-sustaining
feedback loop; position detection of actuators, including micro-actuators used for effecting controlled motion of a disk-drive read / write head, or effecting controlled motion of an
optically active device, such as a positionable mirror for use in
fiber-optic data communications; and application of electrostatic forces for large motions.