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A method for on-line dual-frequency tracking frequency measurement of sc-cut quartz wafer

A quartz wafer, dual-frequency technology, applied in frequency measuring devices, measuring devices, measuring electrical variables, etc., can solve problems such as the inability to confirm the B-mode frequency or the C-mode frequency, the unstable shutdown frequency, and the inability to obtain the B-mode frequency, etc. , to achieve the effect of intelligent grinding process

Active Publication Date: 2022-04-08
RES INST OF ZHEJIANG UNIV TAIZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] 1. The resonant frequency obtained by automatic frequency search cannot be confirmed as the resonant frequency of B-mode or C-mode
2. Even if the current measurement and control instrument detects the correct C-mode frequency and stably tracks and shuts down, but we cannot get the B-mode frequency, the user still cannot confirm whether the final frequency obtained by grinding is correct
3. During the automatic frequency search process of the currently used frequency measuring instrument, since only one frequency value is searched, it is impossible to confirm whether it is a B-mode frequency or a C-mode frequency.
At the same time, the current SC-cut quartz wafer needs to be frequency confirmed after grinding, and the frequency confirmation of B-mode and C-mode can only be performed through a network analyzer or other frequency measurement devices, but cannot be confirmed when it is in the grinding machine
[0008] Based on the above reasons, the current grinding process of SC-cut quartz wafers is basically based on the number of turns to judge the thickness and stop the control, and then use the network analyzer or other frequency measurement devices to confirm the frequency. This method will cause the stop frequency to be extremely high Stable, low repeatability, and there is a possibility of frequency judgment error

Method used

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  • A method for on-line dual-frequency tracking frequency measurement of sc-cut quartz wafer
  • A method for on-line dual-frequency tracking frequency measurement of sc-cut quartz wafer
  • A method for on-line dual-frequency tracking frequency measurement of sc-cut quartz wafer

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Effect test

Embodiment 1

[0049] An online dual-frequency tracking frequency measurement method of an SC-cut quartz wafer online grinding frequency measurement system, such as Figure 11 As shown, the dual-frequency tracking function analyzes the resonant waveform detected in a single sweep of two frequency tracking frequency measurement. The sweeping range of the two frequency tracking frequency measurement can ensure that two resonant frequencies are covered. During the analysis of the sweeping process Waveform conditions such as Figure 11 Shown:

[0050] The waveforms between the two resonant frequencies F1 and F2 obtained by frequency sweep include no waveform, 1 waveform, and more than 2 waveforms; therefore, there are 3*3 waveforms after the combination of the two waveforms in the frequency sweep range. = 9 cases. The frequency sweep ranges of F1 and F2 are related to the search width. Under a certain search width, there will be a certain overlapping area between the frequency sweep range of F...

Embodiment 2

[0081] Such as Figure 1 to Figure 17 As shown, the SC-cut quartz wafer online grinding frequency measurement system has the following functions:

[0082] 1. During the grinding process, it can automatically search for the B-mode frequency and C-mode frequency of the quartz wafer, and confirm whether the searched frequency is the B-mode frequency or the C-mode frequency according to the proportional relationship.

[0083] 2. During the tracking frequency measurement process, it can track the B-mode frequency and C-mode frequency in real time, and provide corresponding statistics in real time, such as the number of quartz wafers measured in one circle, the dispersion of a single chip, the dispersion of the whole disk, and the grinding rate, etc. information, and simultaneously display the change curve of the resonant frequency of the wafer and the change curve of the dispersion difference during the grinding process, and the user can judge the incoming material of the wafer and...

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Abstract

The invention discloses an online dual-frequency tracking method for SC-cut quartz wafers, which includes a dual-frequency tracking function; the dual-frequency tracking function analyzes the resonant waveforms detected by a single sweep of two frequency tracking frequency measurements; The invention provides an online dual-frequency tracking frequency measurement method for an SC-cut quartz wafer with high processing efficiency, high data accuracy, and accurate distinction between dual-mode frequencies.

Description

technical field [0001] The invention relates to the field of quartz wafers, more specifically, it relates to an SC-cut quartz wafer on-line grinding frequency measurement system. Background technique [0002] The core components of crystal oscillators (active crystal oscillator, oscillator) and crystal resonators (passive crystal oscillator, crystal) are quartz chips, and the design of quartz chips determines the performance of oscillators and resonators to a large extent. The material of the quartz wafer is quartz rod (quartz). Due to the anisotropy of the crystal, the quartz wafer cut from different directions of the quartz rod has completely different effects. The cutting method of the quartz rod determines the elasticity of the quartz wafer. Constant, dielectric constant, expansion coefficient, temperature characteristics, etc., such as frequency temperature coefficient, frequency thickness coefficient, stress compensation coefficient, etc. The difference in these charac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R23/02G01R29/027G01R29/033
CPCG01R23/02G01R29/027G01R29/0273G01R29/033
Inventor 潘凌锋郭彬陈浙泊余建安林建宇陈一信颜文俊林斌
Owner RES INST OF ZHEJIANG UNIV TAIZHOU