A method for on-line dual-frequency tracking frequency measurement of sc-cut quartz wafer
A quartz wafer, dual-frequency technology, applied in frequency measuring devices, measuring devices, measuring electrical variables, etc., can solve problems such as the inability to confirm the B-mode frequency or the C-mode frequency, the unstable shutdown frequency, and the inability to obtain the B-mode frequency, etc. , to achieve the effect of intelligent grinding process
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Embodiment 1
[0049] An online dual-frequency tracking frequency measurement method of an SC-cut quartz wafer online grinding frequency measurement system, such as Figure 11 As shown, the dual-frequency tracking function analyzes the resonant waveform detected in a single sweep of two frequency tracking frequency measurement. The sweeping range of the two frequency tracking frequency measurement can ensure that two resonant frequencies are covered. During the analysis of the sweeping process Waveform conditions such as Figure 11 Shown:
[0050] The waveforms between the two resonant frequencies F1 and F2 obtained by frequency sweep include no waveform, 1 waveform, and more than 2 waveforms; therefore, there are 3*3 waveforms after the combination of the two waveforms in the frequency sweep range. = 9 cases. The frequency sweep ranges of F1 and F2 are related to the search width. Under a certain search width, there will be a certain overlapping area between the frequency sweep range of F...
Embodiment 2
[0081] Such as Figure 1 to Figure 17 As shown, the SC-cut quartz wafer online grinding frequency measurement system has the following functions:
[0082] 1. During the grinding process, it can automatically search for the B-mode frequency and C-mode frequency of the quartz wafer, and confirm whether the searched frequency is the B-mode frequency or the C-mode frequency according to the proportional relationship.
[0083] 2. During the tracking frequency measurement process, it can track the B-mode frequency and C-mode frequency in real time, and provide corresponding statistics in real time, such as the number of quartz wafers measured in one circle, the dispersion of a single chip, the dispersion of the whole disk, and the grinding rate, etc. information, and simultaneously display the change curve of the resonant frequency of the wafer and the change curve of the dispersion difference during the grinding process, and the user can judge the incoming material of the wafer and...
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