Lamb wave resonator with POI structure

A technology of Lamb wave resonators and resonators, which is applied in the radio frequency field of mobile phones, can solve problems such as spurious effects, lower Q values, and affect resonator performance, and achieve high Q values

Pending Publication Date: 2021-04-23
GUANGDONG CANCHIP TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] The development of 5G mobile phone filters requires lower loss, higher frequency and larger bandwidth, which poses serious challenges to the existing surface acoustic wave (SAW) and bulk acoustic w

Method used

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  • Lamb wave resonator with POI structure
  • Lamb wave resonator with POI structure
  • Lamb wave resonator with POI structure

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Embodiment Construction

[0037] The present invention will be described in detail below in conjunction with the accompanying drawings, and the features of the present invention will be further revealed in the following detailed description.

[0038] figure 1 It is a schematic diagram of the structure of a surface acoustic wave interdigital transducer (IDT). Such as figure 1 As shown in , on the surface of the piezoelectric substrate, deposit a layer of metal film, and then use the photolithography method in the semiconductor planar process to obtain a set of comb-shaped intersecting metal electrodes. These metal electrodes shaped like human fingers are intersected with each other, and bus bars at both ends are connected together to form two stages of the device, thereby obtaining an interdigital transducer. exist figure 1 In the example of , a total of 6 metal electrodes labeled 1-6 are shown, indicating that the number of interdigital electrodes of this IDT is 6, and the electrodes with odd number...

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Abstract

The invention provides a Lamb wave resonator with a POI structure. The Lamb wave resonator may include: a substrate of high acoustic velocity material; a piezoelectric layer located above the substrate made of the high-sound-velocity material, wherein a first interdigital transducer and a second interdigital transducer are arranged on the upper surface and the lower surface of the piezoelectric layer respectively, and interdigital electrodes of the first interdigital transducer and the second interdigital transducer are opposite to each other in the stacking direction across the piezoelectric layer. The first interdigital transducer and the second interdigital transducer have same electrode width, electrode thickness, electrode pitch, duty cycle p, and excitation sound wave wavelength lambda, where the duty cycle p = electrode width/(electrode width + electrode pitch), and where the duty cycle p is set to 0.2-0.5.

Description

technical field [0001] The invention relates to the radio frequency field of mobile phones, and more specifically, to a Lamb wave resonator with a POI structure. Background technique [0002] The development of 5G mobile phone filters requires lower loss, higher frequency and larger bandwidth, which poses serious challenges to the existing surface acoustic wave (SAW) and bulk acoustic wave (BAW) technologies, which are usually affected by more stray effect limitations. In order to meet this demand, the recently proposed Lamb (Lamb) wave structure, which mainly adopts the plate wave mode, has a high sound velocity, and shows application advantages in sub-6GHz and millimeter wave mobile communications. In a Lamb wave resonator, the main mode is the Lamb wave, and the modes such as the Rayleigh wave are the spurious modes. The presence of spurious modes can affect the performance of the resonator, such as reducing the Q value (quality factor). How to improve the electromecha...

Claims

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Application Information

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IPC IPC(8): H03H9/02H03H9/17
CPCH03H9/02228H03H9/17
Inventor 许欣李红浪柯亚兵
Owner GUANGDONG CANCHIP TECH CO LTD
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