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Gas detector

A gas detector and gas detection technology, which are applied in gas processing, structural details of gas analyzers, and analysis of gas mixtures, etc., can solve problems such as being unsuitable for removing ethanol and hindering gas detection of detection objects.

Pending Publication Date: 2021-04-23
FIGARO ENG INC +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since organic polymer gas permeable membranes filter gases based on molecular weight, they are not suitable for removing ethanol when detecting gases to be detected such as methane, LPG, and CO.
In addition, ethanol is a representative of impurity gases that are generated on a daily basis and interferes with the detection of target gases

Method used

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Embodiment

[0032] Figure 1 ~ Figure 4 represents the gas sensor 2 of the embodiment, Figure 5 , Figure 6 Indicates the test result. The gas sensor 2 has, for example, a Si chip 4 which is an example of a gas detection unit. The Si chip 4 is accommodated in a case 5 made of ceramics or the like, and is fixed in the case 5 by die bonding or the like. A ceramic cover 6 covers the opening of the case 5 , and the atmosphere outside the case is supplied to the filter 8 through a plurality of openings 7 . A film-shaped filter 8 is attached to the inner surface (surface on the Si chip 4 side) of the cover 6 . The filter 8 is composed of two layers of an organic polymer filter 10 and an activated carbon filter 14. The organic polymer filter 10 is arranged on the outside air side of the case 5, and the activated carbon filter 14 is arranged on the Si chip 4 side. The activated carbon filter 14 is an example of an inorganic filter, and may be an oxidation catalyst filter, etc. It is prefera...

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Abstract

This gas detector is housed inside the housing of a gas sensor, and the atmosphere outside the housing is introduced to the gas detector through a filter attached to the housing. The filter is provided with a gas-permeable organic polymer filter for removing siloxane, and an inorganic filter which removes alcohol and allows the detection-target gas to pass therethrough.

Description

technical field [0001] The present invention relates to a gas detector such as a gas sensor, and particularly to a filter thereof. Background technique [0002] An organic polymer gas permeable membrane such as PTFE (polytetrafluoroethylene) is known as a filter for a gas sensor (Patent Document 1). A gas-selective permeable membrane having high gas permeability and high gas selectivity has also been developed (Non-Patent Document 1). Regardless of the case of the PTFE membrane or the gas selective permeation membrane, gases such as hydrogen and methane with a small molecular weight permeate the membrane quickly, while gases such as toluene with a large molecular weight permeate the membrane only slowly. [0003] Gas sensors have the problem of being easily poisoned by siloxane. Due to the large molecular weight of siloxane, the organic polymer gas permeable membrane is expected to be used as a filter of siloxane. However, organic polymer gas permeable membranes are not s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/04G01N27/12
CPCG01N1/2205G01N1/2214G01N1/2273G01N2001/2288B01D53/228B01D69/02B01D71/10B01D2325/16B01D2325/14B01D53/229B01D53/0407B01D2257/55B01D2257/70B01D2253/106B01D2253/202B01D39/1692B01D39/18B01D39/06B01J20/20B01D39/2065B01D39/2072B01D39/2082B01D39/1623B01D2239/1216B01D2239/0407B01D39/2058B01J20/16B01J20/103B01J20/18B01J20/28033B01J20/262B01J20/265B01J20/28035G01N27/128G01N33/0059G01N33/0014G01N27/407G01N33/0009B01D39/2055B01D2257/556B01D2259/10B01D2325/20G01N27/30G01N27/403
Inventor 竹内雅人古野纯平福井健太井泽邦之佐井正和三桥弘和谷口卓史
Owner FIGARO ENG INC
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