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Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals, single crystal furnace system and stabilizing method

A technology of automatic stabilization and positioning mechanism, which is applied in the direction of single crystal growth, chemical instruments and methods, and self-melt pulling method, etc., can solve the problems of difficulty in ensuring the stability and accuracy of seed crystals, shaking of single crystals, etc., and achieve shortening of invalid working hours, The effect of increasing output and reducing automation efficiency

Pending Publication Date: 2021-10-26
内蒙古中环晶体材料有限公司
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Problems solved by technology

This process often takes seven to ten minutes, which is a serious waste of time, which is an important reason affecting the automation process of the single crystal furnace, and the stability and accuracy of the seed crystal is difficult to guarantee due to the relationship between skills and time in some operations, which will lead to single crystal pulling in the subsequent process. Occurrence of abnormal accidents such as crystal shaking

Method used

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  • Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals, single crystal furnace system and stabilizing method
  • Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals, single crystal furnace system and stabilizing method
  • Single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals, single crystal furnace system and stabilizing method

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Embodiment Construction

[0037] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0038] figure 1 It shows a schematic structural diagram of an embodiment of the present invention, and specifically shows the structure of this embodiment. This embodiment relates to a single crystal furnace positioning mechanism for automatically stabilizing a seed crystal, a single crystal furnace system and a method for Czochralski During the single crystal process, the automatic positioning and seed crystal stabilization are carried out to realize the automatic stabilization of the seed crystal, which reduces the labor intensity and improves the productivity. At the same time, the seed crystal stabilization automation process is performed in the single crystal furnace sub-chamber gyration and the air replacement in the sub-chamber. It is carried out in the protective gas process to realize the seamless connection between the automatic rotat...

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Abstract

The invention provides a single crystal furnace positioning mechanism capable of automatically stabilizing seed crystals. The positioning mechanism is arranged at the top end of a single crystal furnace auxiliary chamber and comprises a connecting device and a positioning device, one end of the connecting device is connected with the single crystal furnace auxiliary chamber, and the other end of the connecting device is connected with the positioning device; and the two ends of the positioning device are communicated with the outside, and the positioning device and the auxiliary chamber are coaxially arranged, so that the seed crystal is conveniently positioned and stabilized. The positioning mechanism has the beneficial effects that when the positioning mechanism is applied to the single crystal Czochralski process, the seed crystals can be stabilized in the single crystal Czochralski process, so that the seed crystal stabilizing process is automatically carried out, the automatic stabilization of the seed crystals is realized, the labor intensity is reduced, and the production efficiency is improved.

Description

technical field [0001] The invention belongs to the technical field of Czochralski single crystal, and in particular relates to a single crystal furnace positioning mechanism for automatically stabilizing a seed crystal, a single crystal furnace system and a process. Background technique [0002] At present, the competition in the industry is becoming increasingly fierce, and the degree of automation of single crystal production enterprises is gradually increasing, from the era of Industry 2.0 to the era of Industry 3.0 and 4.0. During the single crystal pulling process, the equal diameter process has been automatically controlled, and before the single crystal is pulled, the seed crystal needs to be maintained in a stable state to ensure that the seed crystal growth process will not shake and avoid stress. [0003] At present, the positioning of the seed crystal is all done manually. This process requires the seed crystal to be lowered to the visible position of the auxilia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/30C30B15/32C30B15/20
CPCC30B15/30C30B15/32C30B15/20
Inventor 赵国伟王林高润飞谷守伟王建平周泽杨志吴树飞刘振宇郝瑞军刘学皇甫亚楠杨瑞峰郭志荣钟旭
Owner 内蒙古中环晶体材料有限公司
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