Heating device and crystal pulling equipment

A heating device and equipment technology, applied in the directions of crystal growth, single crystal growth, single crystal growth, etc., can solve the problems of inability to adapt to the development needs of single crystal manufacturing technology, slow heating speed, and large heat loss, etc.

Pending Publication Date: 2021-12-03
LONGI GREEN ENERGY TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the heat loss of this heating method is relatively large, not only the heating speed is slow, the temperature control accuracy is difficult to control, but it is also not conducive to the development of single crystal manufacturing in the direction of large size and large thermal field, and cannot adapt to the technology of single crystal manufacturing in the photovoltaic industry development needs

Method used

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  • Heating device and crystal pulling equipment
  • Heating device and crystal pulling equipment
  • Heating device and crystal pulling equipment

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Embodiment Construction

[0045] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0046] It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0047] In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indic...

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Abstract

The invention discloses a heating device and crystal pulling equipment, relates to the technical field of crystal pulling, and aims to accurately control the temperature in the crystal pulling process under the condition of increasing the crystal pulling heating speed. The heating device comprises microwave generators, microwave oscillators and a crucible piece. The number of the microwave generators is at least one. At least one microwave generator is arranged on the furnace body. The microwave oscillators are arranged in the furnace body. Each microwave generator is matched with the microwave oscillator. The crucible piece is arranged in the microwave oscillator. The microwave oscillator is provided with a plurality of wave feeding holes used for feeding microwaves generated by the microwave generators to the outer wall of the crucible piece. The crucible piece is used for converting microwave energy into heat energy. The crystal pulling equipment comprises the heating device provided by the technical scheme. The heating device is used for crystal pulling.

Description

technical field [0001] The invention relates to the technical field of crystal pulling, in particular to a heating device and crystal pulling equipment. Background technique [0002] The Czochralski method, also known as the Czochralski method, is a single crystal growth method established by Czochralski, referred to as the CZ method. At present, single crystal furnaces are widely used as single crystal growth equipment, and single crystal silicon rods are grown by Czochralski method. [0003] In the prior art, a single crystal furnace has a furnace body, a graphite resistance heater disposed in the furnace body, and a quartz crucible for accommodating crystal materials. The quartz crucible is located inside a graphite resistance heater. When heating the crystal material, a large current is passed to the graphite resistance heater to heat the quartz crucible containing the crystal material by the graphite resistance heater, thereby providing sufficient heat for the growth ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/14C30B15/00C30B29/06
CPCC30B15/14C30B15/00C30B29/06
Inventor 王正远李侨徐战军周锐武刚
Owner LONGI GREEN ENERGY TECH CO LTD
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