34 results about "Microwave oscillators" patented technology

To provide a sintered compact production apparatus which can reduce the cooling power of a microwave oscillator and further can reduce the heating energy of an object to be heated caused by microwaves.SOLUTION: A sintered compact production apparatus 1 provided with a microwave heating device 2 having a microwave oscillator 21 which oscillates microwaves, a wave guide 22 which is connected to the microwave oscillator 21 and a microwave heating furnace 23 where the microwaves are propagated via the wave guide 22, and is configured to heat an object 5 to be heated in the microwave heating furnace 23 with the microwaves, comprises: an air cooling type cooling device 4 which feeds air to the microwave oscillator 21 and cools the same; and a preheater 3 which preheats the object 5 to be heated with the air which has fed from the air cooling type cooling device 4 to the microwave oscillator 21 and has recovered heat generated in the microwave oscillator 21.SELECTED DRAWING: Figure 1

The invention relates to the technical field of microwave photonics, and discloses a full-band noise microwave source system and a microwave signal generation method. An optical reference unit is used for generating an optical reference signal; the photoelectric phase detection unit is connected with the optical reference unit and is used for receiving the optical reference signal and a feedback signal sent by the microwave oscillation unit and outputting a beat frequency electric signal for reflecting a phase error; the servo control unit is connected with the photoelectric phase detection unit and the microwave oscillation unit and is used for separating the beat frequency electric signal into a low-frequency control signal and a high-frequency control signal; the microwave oscillation unit is connected with the servo control unit and outputs a target microwave signal in response to the low-frequency control signal and the high-frequency control signal. A beat frequency electric signal is separated into a low-frequency path and a high-frequency path by using the servo control unit, so that targeted suppression of phase noise of different frequency bands in a single signal source is realized.

This green tire warming device for retreading for warming a green tire for retreading before vulcanization comprises: a warming chamber body 2 configured to partition a warming chamber 21; a microwave oscillation unit 3 provided on an inner wall surface of the warming chamber body and configured to irradiate the inside of the warming chamber with microwaves; a pair of shielding plates 4 configured to shield the microwaves; and a rotating tool 5 configured to rotate the green tire for retreading placed in the heating chamber in the tire circumferential direction relative to the warming chamber body. While the green tire for retreading, in which a pair of side portions of the green tire for retreading are covered from both outer sides in the tire width direction by the pair of shielding plates, is rotated in the tire circumferential direction relative to the warming chamber body by the rotating tool, a green tread rubber of the green tire for retreading that is not covered by the pair of shielding plates is warmed by microwaves radiated from the microwave oscillation unit.

The invention discloses a multi-port phase-compensated nested microwave plasma diamond film deposition device, wherein a resonant cavity part comprises an inner cavity, an annular waveguide, a slit opening, a quartz ring, a metal stage, a deposition stage, a substrate and a groove, wherein the slit opening is located on the wall of the inner cavity and connects the inner cavity with the annular waveguide; the metal stage supports the quartz ring; the deposition stage is arranged at the bottom center of the inner cavity and is in an I-shape; the substrate is arranged above the deposition stage; the groove is arranged at the top of the inner cavity; the inner cavity and the quartz ring are both hollow cylindrical, and the annular waveguide is arranged around the inner cavity; a plurality of microwave transmission parts are arranged, all of which are connected to the resonant cavity part to feed microwaves into the inner cavity, and comprise a microwave source, a circulator and a waveguide magic-T structure, wherein the microwave source generates microwave oscillations, the circulator is arranged at the outlet of the microwave source to protect the microwave source from being affected by the reflected microwave power, and the waveguide magic-T structure is used for tuning impedance.

The invention discloses an all-optical microwave oscillator based on a non-polarized radial mode LN-PM birefringence effect, which is used for solving the technical problem that an electronic bottleneck of high frequency and low stability is difficult to break through due to the fact that additional noise is extremely easy to generate due to introduction of an electric signal in a traditional photoelectric oscillator, and belongs to the technical field of optical fiber communication and microwave photonics. The birefringence effect of LN-PM is introduced into the microwave photonic oscillator based on forward Brillouin scattering, the gain and loss coefficient of forward Brillouin are controlled by adjusting a polarization controller, and when the gain coefficient is equal to the loss coefficient and greater than a coupling coefficient, the space time is symmetrically broken to obtain single longitudinal mode microwave photon output. Compared with the prior art, the self-excited pumping source is adopted, electric signal modulation is not needed, a single-frequency microwave photon signal which is high in frequency stability, low in phase noise and high in side-mode rejection ratio can be generated, and the system has the advantages of being simple in structure and higher in adaptability and reliability.

The invention relates to the technical field of forward wave oscillators, in particular to a K-band TE11 mode microwave oscillator. Comprising a cylindrical waveguide, and sequentially comprises a cut-off transition section, an interaction section and an output transition section, the cathode structure is mounted in the cut-off transition section; the anode waveguide structure comprises a plurality of slotted circular ring metamaterial units which are arranged in the interaction section at intervals in the axial direction, are linked through a metal cylinder to form a serial structure and are connected to the wall of the cylindrical waveguide to form a double-spiral anode slow wave structure; electron beams generated by the cathode structure rotate in the axial direction under the action of an external electromagnetic field, interact with each other in the anode slow wave structure to excite forward waves in a TE11 mode, and radiate outwards along an output transition section; the collector is arranged in the output transition section. On the basis of realizing a Gaussian beam TE11 mode, a traditional mode conversion structure is omitted, the structure is more compact, and light weight and miniaturization are easy to realize.

To provide a magnon junction, a magnon random access memory, a microwave oscillator, a detector, and an electronic apparatus.SOLUTION: A magnon junction includes: a first electrode layer formed of a nonmagnetic conductive material; a free magnetic layer provided on the first electrode layer and formed of a ferromagnetic conductive material; an antiferromagnetic barrier layer provided on the free magnetic layer and formed of an antiferromagnetic insulating material; a reference magnetic layer provided on the antiferromagnetic barrier layer and formed of the ferromagnetic conductive material; and a second electrode layer provided on the reference magnetic layer and formed of the nonmagnetic conductive material. The reference magnetic layer has perpendicular magnetic anisotropy or a perpendicular magnetic moment component, and a magnetic moment direction thereof is fixed along a perpendicular direction. The free magnetic layer has the perpendicular magnetic anisotropy or a perpendicular magnetic moment component, and a magnetic moment direction thereof is reversible along a perpendicular direction. The antiferromagnetic barrier layer has the perpendicular magnetic anisotropy or the perpendicular magnetic moment.SELECTED DRAWING: Figure 3

The present invention discloses a microwave oscillator based on a BGA-GWG resonant cavity, comprising an oscillation circuit, a BGA-GWG resonant cavity, and a source microstrip line. The oscillation circuit uses a field-effect transistor as an active device, and the gate of the field-effect transistor is connected in series with an ohmic microstrip line. The drain electrode is connected to one end of a first series microstrip line and a parallel open microstrip line, and the other end of the first series microstrip line and the parallel open microstrip line serves as the oscillator output end. The source electrode is connected to one end of a second series microstrip line and a parallel open microstrip line, and the other end of the second series microstrip line and the parallel open microstrip line serves as the oscillator source end and is connected to the source microstrip line. The BGA-GWG cavity is a GWG cavity based on BGA flip-chip technology, which is coupled next to the source microstrip line. The oscillator of the present invention has ultra-high stability of the output frequency and ultra-low phase noise, and is lightweight and compact.

The present application discloses a photonic integrated circuit, control method, device and medium, which are related to the field of optics. By controlling the electro-optic effect of the lithium niobate layer and the oscillation signal of the microwave oscillator through an external electrical signal, any effective refractive index distribution can be achieved in theory, realizing the programmable control of the metastructure waveguide, and promoting the reusability and sustainable use of the device; it has the ability to reset functions, and can switch in real time according to the written external voltage program, realizing true artificial intelligence; multiple functions can be achieved through a single structure, reducing production costs and technical barriers, and providing a way of scalability, with strong application potential; compared with thermo-optical and acousto-optic modulation technologies, the electro-optical control and microwave control provided by the present application have fast modulation speed, low cost and high repeatability; compared with two-dimensional materials and nonlinear modulation technologies, the electro-optical control and microwave control provided by the present application have stable working conditions and are easy to process.

This invention discloses an adjustable frequency microwave oscillator, comprising a feedback resonant network, an active transistor amplifier, and a phase adjustment network. The feedback resonant network includes a resonator. The active transistor amplifier is connected to the feedback resonant network through an input matching network and an output matching network. The phase adjustment network is equivalent to a variable capacitor. The signal passes through the input matching network, the active transistor amplifier, the output matching network, and the feedback resonant network to form a positive feedback oscillation. The phase of the loop is adjusted by regulating the equivalent variable capacitor of the phase adjustment network. The oscillation frequency is adjusted by the phase adjustment network, and the oscillation conditions of the oscillator are improved by a high-Q frequency selection network, enabling precise control of the frequency and power of the microwave oscillator.

The present invention relates to an upright quantum diamond microscope device comprising: a nitrogen-vacancy defect diamond substrate which is mounted in a housing and positioned below an objective lens so as to face the objective lens; a bias magnetic field application unit for applying a magnetic field to the nitrogen-vacancy defect diamond substrate; a microwave oscillation unit for applying microwaves to the nitrogen-vacancy defect diamond substrate; a laser light source for irradiating laser light onto the nitrogen-vacancy defect diamond substrate; an imaging unit for detecting, from the nitrogen-vacancy defect diamond substrate, light excited in response to the incident laser light; and a main processing unit for measuring and providing a current signal for an object to be inspected, by using image information captured by the imaging unit.

A head assembly includes an upper cover assembly disposed above a plasma reaction zone, the upper cover assembly including a top plate and a bottom plate defining a region for containing a cooling fluid therebetween, the bottom plate including one or more openings, one or more plasma modules coupled to the plasma reaction zone through the openings, each of the plasma modules including a microwave source generating a microwave oscillation, a waveguide assembly, and a resonant cavity, the microwave oscillation reacting with a reactant gas, and one or more guide line assemblies configured to direct an effluent from a semiconductor process to the plasma reaction zone.

This invention relates to a dual-band non-frequency-doubled high-power microwave oscillator with a coaxial drift cavity, comprising a cathode holder, a ring cathode, an anode outer cylinder, a first drift cavity, a first slow-wave structure, a second drift cavity, a second slow-wave structure, an output waveguide, an inner conductor, and an external guiding magnetic field. The entire structure is rotationally symmetrical about its central axis, and the components are arranged coaxially along the electron beam transmission direction, forming a complete electron beam transmission and microwave generation path. This invention uses a coaxial drift cavity to isolate the two slow-wave structures, achieving a reflection coefficient greater than 0.99 for the microwaves generated by the two slow-wave structures, exhibiting high reflection characteristics. This effectively isolates the two slow-wave structures from each other, avoiding beam-wave interaction interference. This overcomes the limitation of previous devices where the output frequency of dual-frequency microwaves was approximately a harmonic relationship, allowing for more flexible selection of the operating frequency.

An electron paramagnetic resonance (=EPR) spectrometer (1), comprising - a sample resonator (2), comprising a sample area (3) for a measurement sample (4) to be held in the sample resonator (2); - a tunable microwave source (7), for generating a tunable microwave signal to be applied to the sample resonator (2), - a magnet system (5), for generating a variable magnetic field to be applied at least to the sample area (3) in the sample resonator (2), and - and a microwave detector (9) connected to the sample resonator (2) for detecting microwave radiation, is characterized in that the tunable microwave source (7) comprises - a fixed frequency microwave oscillator (20), for generating a fixed frequency microwave signal, - a tunable frequency generator (27), for generating a tunable high frequency (=HF) signal, wherein the tunable HF signal is of lower frequency as compared to the fixed frequency microwave signal, and - a mixer (32), for mixing the fixed frequency microwave signal and the tunable HF signal, thus generating a tunable microwave signal. The invention provides an EPR spectrometer with high spectral resolution, which is simple and inexpensive in production and operation.

The invention relates to a V-band high-power microwave oscillator based on distributed extraction, a solenoid magnetic field is electrified to generate a magnetic field, under the guidance of the magnetic field, an electron beam is transmitted into a drift tube, and is transmitted to two sections of V-band slow wave structure areas of an internal coaxial electromagnetic structure along the axial direction; in the area of the first section of slow wave structure, the beam and the wave are synchronized to enable the beam to generate speed modulation, the speed modulation obtained by the beam in the first section of slow wave structure is converted into density modulation in the drift cavity through drift motion, finally, the electron beam and the coaxial slow wave structure generate beam-wave action in the second section of slow wave structure, energy is given to a microwave field, and therefore HPM is generated. The second coaxial microwave output waveguide is communicated and coupled with the seventh slow-wave structure period and the twelfth slow-wave structure period of the second section of slow-wave structure, so that a part of energy given to microwaves by electron beams is output from the second coaxial microwave output waveguide, and the distributed extraction effect is achieved; and the power capacity of the device is effectively improved.

The present invention discloses a traveling ship deicing monitoring device including a vehicle body provided with a universal wheel. The vehicle body can be adsorbed to the hull by an electromagnet installed at its bottom and can travel on the hull. Optical probes capable of recognizing paint rails are provided at both the front and rear of the vehicle body. Inside the vehicle body, an automatic control chip is further provided that can control the traveling of the traveling deicing monitoring device along the paint rail on the hull surface. The automatic control chip simultaneously controls a microwave oscillator for vibrating and crushing ice and an infrared heating device for heating and defrosting. At the top of the vehicle body, an infrared monitoring device for monitoring the ice layer situation of the hull and a network upload module for transmitting ice layer information and device position information are provided. The beneficial effects of the present invention are as follows. The present invention can timely deice all positions around the hull and on the deck that require deicing, combines thermal defrosting with mechanical ice crushing, has a wide deicing action range, high deicing efficiency, can achieve self-propelled traveling and deicing, can also be remotely controlled, and saves labor and costs.

Disclosed are a magnon junction, magnon random access memory, microwave oscillator and detector, and electronic device. The magnon junction comprises: a first electrode layer formed by non-magnetic conductive material; a free magnetic layer arranged on the first electrode layer, formed by ferromagnetic conductive material; an antiferromagnetic barrier layer arranged on the free magnetic layer, formed by antiferromagnetic insulator material; a reference magnetic layer arranged on the antiferromagnetic barrier layer, formed by ferromagnetic conductive material; and a second electrode layer arranged on the reference magnetic layer, formed by non-magnetic conductive material. The reference magnetic layer has perpendicular magnetic anisotropy or perpendicular magnetic moment component, moment direction of which is fixed along a vertical direction; the free magnetic layer has perpendicular magnetic anisotropy or a perpendicular magnetic moment component, moment direction of which is flippable along the perpendicular direction; the antiferromagnetic barrier layer has perpendicular magnetic anisotropy or perpendicular magnetic moment component.

The invention relates to the technical field of cigarette appliances, and provides a cigarette heating appliance for microwave detection of tobacco shred moisture and a control method.The cigarette heating appliance comprises a shell, a switch device arranged on the shell, a heating body arranged in the shell and allowing a cigarette to be inserted therein, a PCB control circuit board arranged in the shell and a probe support arranged in the shell; a system controller, a microwave oscillator and a microwave receiver are arranged on the PCB control circuit board, a microwave emitter and a microwave receiving probe are arranged on the probe support and symmetrically arranged on the two sides of the heating body, the microwave oscillator is connected with the microwave emitter through a microwave conduction wire, and the microwave receiver is connected with the microwave emitter through a microwave conduction wire. And the microwave receiver is connected with the microwave receiving probe through a microwave conducting wire. The moisture content of the tobacco shreds is detected in a non-contact mode through microwaves, the power of the heating body is controlled according to the moisture content of the tobacco shreds, and the fragrance of smoke is better; meanwhile, when the change of the moisture content of the cigarette is large and the cigarette is not suitable for smoking, the smoking set cannot be heated and prompts the user, and the influence on the customer experience is avoided.

The application discloses a three-dimensional spin Hall nano oscillator series-parallel array and a preparation method, wherein the array comprises a plurality of spin Hall nano microwave oscillator units of double-layer and / or three-layer film structures; the plurality of units are arranged in stacks to form a three-dimensional spin Hall nano oscillator series-parallel array; current passes through the left and right electrodes into the oscillator, is converted into a spin current in a strong spin-orbital coupling layer, and acts on a ferromagnetic layer magnetic moment; high-frequency precession of the magnetic moment causes a periodical change of the device resistance through a magnetoresistance effect; under the assistance of a spontaneous exchange bias field generated by exchange coupling effect, a microwave signal is output. The application uses an exchange bias field generated by exchange coupling effect between an anti-ferromagnetic layer and a ferromagnetic layer to replace an external magnetic field, reduces complexity of application, and on the other hand, adopts a three-dimensional spin Hall nano oscillator series-parallel array method to greatly improve output signal power, and can be widely applied to the fields of information communication and radio frequency technology.

The invention discloses a broadband microwave excitation source capable of fast frequency modulation, and relates to the field of microwave excitation sources. Comprising an integrated microwave oscillation module, a double-loop phase-locked loop module, an adaptive frequency pre-calibration module, a power and frequency linkage adjustment unit, a high-speed digital control unit, a power amplification module, a power management module and an electromagnetic interference adaptive module. According to the invention, 1GHz-40GHz wide frequency coverage and rapid frequency modulation switching of less than or equal to 60ns are realized through the double-loop phase-locked loop module, the scene pre-judgment and parameter pre-loading functions are matched to adapt to the requirements of multiple application scenes, and by means of reverse counteracting and shielding optimization of the electromagnetic interference self-adaptive module and double-factor compensation of the self-adaptive frequency pre-calibration module, the frequency modulation switching efficiency is improved. The frequency deviation caused by interference is controlled to be smaller than or equal to 0.3 kHz, the deviation correction precision before frequency modulation is kept to be smaller than or equal to 0.5 kHz, the frequency deviation is further reduced to be smaller than or equal to 0.2 kHz after multi-module cooperative calibration, and the advantages of being wide in frequency band, fast in frequency modulation, high in precision, high in stability and high in reliability are achieved.

The utility model relates to the technical field of cigarette appliances, and provides a cigarette heating appliance for microwave detection of tobacco shred moisture, which comprises a shell, a switch device arranged on the shell, a heating element arranged in the shell and used for insertion of a cigarette, a PCB (printed circuit board) control circuit board and a probe support arranged in the shell, a system controller, a microwave oscillator and a microwave receiver arranged on the PCB control circuit board, and a temperature sensor arranged on the system controller, a microwave emitter and a microwave receiving probe are arranged on the probe support, the microwave emitter and the microwave receiving probe are symmetrically arranged on the two sides of the heating body, the microwave oscillator is connected with the microwave emitter through a microwave conduction wire, and the microwave receiver is connected with the microwave receiving probe through a microwave conduction wire. The moisture content of the tobacco shreds is detected in a non-contact mode through microwaves, the power of the heating body is controlled according to the moisture content of the tobacco shreds, and the fragrance of smoke is better; meanwhile, when the change of the moisture content of the cigarette is large and the cigarette is not suitable for smoking, the smoking set cannot be heated and prompts the user, and the influence on the customer experience is avoided.

A microwave plasma treatment device includes a resonator including a container; a single microwave oscillation source that outputs a reference microwave; a waveguide that connects the microwave oscillation source and the resonator to each other; and a phase control mechanism that generates a modified microwave having a phase different from a phase of the reference microwave by controlling the phase of the reference microwave. The resonator includes one or more first-type introducing portions for introducing the reference microwave into the resonator and one or more second-type introducing portions for introducing the modified microwave into the resonator, and the microwave plasma treatment device is configured such that at least one of a position, a size, and a shape of a plasma ball generated in the container is changed by superimposing the modified microwave on the reference microwave in the resonator.

The invention is suitable for the technical field of smoking set heating, and provides a control system and method for a microwave heating non-combustion smoking set and the smoking set, and the system comprises a microwave transducer, a microwave isolation module and a microwave power source; the microwave oscillation source is used for providing microwave pulse energy for the microwave transducer; the microwave transducer is used for heating tobacco in a heating cavity of the microwave heating non-combustion smoking set, isolating a microwave alternating current signal and collecting a direct current signal; the microwave isolation module is connected with the microwave transducer and is used for filtering and amplifying a direct current signal of the microwave transducer; the direct-current signal is a direct-current signal corresponding to the temperature value and generated due to the fact that the temperature of the cigarette and the temperature of the microwave transducer change in the heating process; preset impedance is formed between the microwave transducer and the microwave isolation module; the preset impedance is used for performing energy reflection on a microwave alternating current signal of the microwave transducer. The structural complexity of the smoking set can be reduced, and meanwhile the temperature measurement accuracy and the temperature control precision are improved.

The present disclosure relates to an EPR spectrometer having a microwave source including a fixed frequency microwave oscillator and a tunable HF generator. An electron paramagnetic resonance (= EPR) spectrometer (1) comprising-a sample resonator (2) comprising a sample region (3) for a measurement sample (4) to be held in the sample resonator (2); the invention relates to a microwave detector (1) comprising a sample resonator (2), a tunable microwave source (7) for generating a tunable microwave signal to be applied to the sample resonator (2), a magnet system (5) for generating a variable magnetic field at least to be applied to a sample region (3) in the sample resonator (2), and a microwave detector (9) connected to the sample resonator (2) for detecting microwave radiation, characterized in that the tunable microwave source (7) comprises-a fixed frequency microwave oscillator (20) for generating a fixed frequency microwave signal,-a tunable frequency generator (27) for generating a tunable high frequency (= HF) signal, where the tunable HF signal has a lower frequency than the fixed frequency microwave signal, and-a mixer (32) for mixing the tunable HF signal with the fixed frequency microwave signal, and a mixer for mixing the fixed frequency microwave signal and the tunable HF signal to generate a tunable microwave signal. The invention provides an EPR spectrometer with high spectral resolution, which is simple to produce and operate and low in cost.

The invention relates to a microwave oscillator and a preparation method and a driving method thereof. The microwave oscillator comprises a substrate, a heavy metal layer, a free layer, an insulating layer, a fixed layer and a first electrode, the heavy metal layer is located on the substrate, and the free layer is located on the side, away from the substrate, of the heavy metal layer. The barrier structure of the free layer comprises an edge part, an annular concave part and a middle convex part. The potential barrier height of the edge part and the potential barrier height of the middle protruding part are larger than the potential barrier height of the annular concave part. The free layer comprises a magnetic Hopv quantum, and the magnetic Hopv quantum is located in the annular recessed part. The insulating layer is located on one side of the free layer away from the substrate, the fixed layer is located on one side of the insulating layer away from the substrate, and the first electrode is located on one side of the fixed layer away from the substrate. According to the technical scheme, the robustness and reliability of the microwave oscillator in a complex working environment can be remarkably enhanced, and the microwave oscillator can output a high-frequency microwave signal.

The application discloses a kind of microwave reflection quadrature mixing based grain moisture content detection device and its detection method, belong to microwave application technical field, including measured sample, sample container, front panel, device shell and microwave oscillator located in the inside of device shell, power divider, quadrature mixer, circulator, transceiver multiplexing antenna, sliding bracket, guide rail unit and control unit;The application adopts quadrature mixing technology, designs corresponding transceiver multiplexing antenna, realizes the continuous measurement of space standing wave signal by the movement of transceiver multiplexing antenna, and the reflected signal after the action of microwave transmitting signal and sample is quadrature mixed by quadrature mixer, and the function relationship formula is established to retrieve grain moisture content by processing and analyzing signal through control unit, to realize grain moisture content real-time measurement.The application improves the portability and measurement accuracy of microwave moisture content detection device, so that the measurement result is not affected by material thickness and bulk density, and rapid, non-destructive, high-precision detection of granular grain moisture content can be realized.

The application belongs to the technical field of microwave photon and optical communication, and specifically relates to a full-optical microwave oscillator under single-mode optical fiber twist radial mode vernier effect, which comprises a self-excited erbium-doped fiber amplifier, a tunable optical filter, an isolator, a first polarization controller, a second polarization controller, a third polarization controller, a first single-mode optical fiber, a second single-mode optical fiber, a polarizer, a first optical coupler, a second optical coupler, a third optical coupler, a spectrometer, a photoelectric detector and a spectrum analyzer. The application realizes passive mode-locking based on twist radial mode by using nonlinear polarization rotation (NPR) technology, narrows the linewidth to the order of hertz by using a passive intrinsic resonant cavity, effectively suppresses the side mode based on double-ring vernier effect, breaks the limitation that a conventional twist radial mode full-optical microwave oscillator signal cannot generate high-performance twist radial mode full-optical microwave oscillator signal, has unique and innovative advantages, and finally realizes twist radial mode single-longitudinal-mode oscillator signal output with high side mode suppression ratio.

A head assembly, comprising an upper cover assembly, one or more plasma modules, and one or more guide pipe assemblies, wherein the upper cover assembly is provided above a plasma reaction area; the upper cover assembly comprises a top plate and a bottom plate; an area for accommodating a cooling fluid is defined between the top plate and the bottom plate; the bottom plate comprises one or more openings; the plasma module is connected to the plasma reaction area by means of the openings; the plasma module comprises a microwave source that generates a microwave oscillation, a waveguide assembly, and a resonant cavity; the microwave oscillation reacts with a reactive gas; and the guide pipe assembly is configured to guide to the plasma reaction area an effluent from a semiconductor process.

This invention relates to a V-band high-power microwave oscillator based on distributed extraction. A magnetic field is generated by energizing a solenoid magnetic field. Under the guidance of this magnetic field, an electron beam is transmitted to a drift tube and propagates axially into two V-band slow-wave structure regions within an internal coaxial electromagnetic structure. In the first slow-wave structure region, beam-wave synchronization induces velocity modulation in the beam. This velocity modulation is converted into density modulation within the drift cavity through drift motion. Finally, in the second slow-wave structure, the electron beam and the coaxial slow-wave structure undergo beam-wave interaction, transferring energy to the microwave field, thereby generating HPM (High-Power Microwave Oscillator). The second coaxial microwave output waveguide is coupled to the seventh and twelfth slow-wave structure periods of the second slow-wave structure, allowing a portion of the energy transferred from the electron beam to the microwaves to be output from the second coaxial microwave output waveguide, achieving a distributed extraction effect. For non-distributed extraction structures, this effectively improves the device's power capacity.

A method and a system for generating single-sideband Raman light for cold atom interferometer through phase modulation are provided. The system includes a laser, an electro-optic modulator (EOM), a local microwave oscillator, a narrow-bandwidth optical-fiber filter, an optical-fiber power amplifier and a frequency doubling crystal. The laser has frequency of ω and is input to the EOM. The local microwave oscillator applies a modulation voltage with frequency of δ to the EOM and generate double-sideband frequency-modulated light with frequencies of ω±nδ(n=0,1,2, . . . ). This light is filtered by the narrow-bandwidth optical-fiber filter, which outputs the target frequency light and is successively input to the optical-fiber power amplifier and the frequency doubling crystal and yields the single-sideband Raman light for cold atom interferometer. The Raman light generation system has simple structure, low-cost, high integration level, easy implementation, high maturity and good stability, and has practical significance in realizing an engineering-based laser system for high-precision atom interferometer measurement.