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Plasma ashing apparatus and endpoint detection process

InactiveUS20040235299A1Enhance photoresist removalFlexible process platformElectric discharge tubesSemiconductor/solid-state device manufacturingNitrogen plasmaCombustion chamber
A plasma ashing apparatus for removing organic matter from a substrate including a low k dielectric, comprising a first gas source; a plasma generating component in fluid communication with the first gas source; a process chamber in fluid communication with the plasma generating component; an exhaust conduit in fluid communication with the process chamber; wherein the exhaust conduit comprises an inlet for a second gas source and an afterburner assembly coupled to the exhaust conduit, wherein the inlet is disposed intermediate to the process chamber and an afterburner assembly, and wherein the afterburner assembly comprises means for generating a plasma within the exhaust conduit with or without introduction of a gas from the second gas source; and an optical emission spectroscopy device coupled to the exhaust conduit comprising collection optics focused within a plasma discharge region of the afterburner assembly. An endpoint detection process for an oxygen free and nitrogen free plasma process comprises monitoring an optical emission signal of an afterburner excited species in an exhaust conduit of the plasma asher apparatus. The process and apparatus can be used with carbon and/or hydrogen containing low k dielectric materials.
Owner:LAM RES CORP

Integrated illumination assembly for symbology reader

This provides a plurality of novel features that can be applied variously to a reader. In one embodiment, the light pipe is constructed from durable polycarbonate for increased shock resistance and can define a rectangular cross section. The chamfered end of the light pipe is textured or frosted to further diffuse refracted light passing through the end so as to present a more even effect. The conical / tapered diffuser within the light pipe is illuminated by a reflector with a white textured surface that reflects a plurality of rearward-directed illumination sources back into the diffuser. The reflector can define a predetermined cross section that directs further light into the forwardmost, remote regions of the diffuser to generate a better spread of light and alleviate spotting effects. The textured surface on the chamfered light pipe end can be employed to better project indicator light. The illumination sources are arranged in a ring at the inner end of the pipe, and can be multi-colored sources that respond to the controller to project and appropriate color and / or blink in an appropriate pattern to indicate various conditions, such as read success or failure. The controller is adapted to provide indications between image acquisitions. The controller can operate individual portions of the ring so that only corresponding portions of the light pipe perimeter are illuminated in a particular color (quadrants, for example) at a given time. Different quadrants may be simultaneously illuminated in different colors in one example
Owner:COGNEX TECH & INVESTMENT
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