Article transport vehicle and article transport apparatus

A vehicle and article technology, applied in the field of article conveying equipment, can solve problems such as fire danger and driving errors, and achieve the effects of preventing flameout, easy management, and solving fire danger.

Pending Publication Date: 2022-03-01
SEMES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, due to reinstallation of the connection part without turning off the power to the cable or returning without reinstallation of the connection part, there may be problems such as fire hazards, driving errors, etc.

Method used

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  • Article transport vehicle and article transport apparatus
  • Article transport vehicle and article transport apparatus
  • Article transport vehicle and article transport apparatus

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0070] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those having ordinary knowledge in the technical field to which the present invention pertains can easily implement. However, the present invention can be implemented in various ways and is not limited to the embodiments described here.

[0071] In the description of the embodiments of the present invention, when it is judged that the specific description of the relevant known functions or structures may unnecessarily obscure the gist of the present invention, the detailed description is omitted, and the parts that have similar functions and effects are described in The same reference numbers are used throughout the figures.

[0072] At least some of the terms used in the specification are defined in consideration of the functions in the present invention, and thus may vary depending on the intention of the user, operator, custom, and the lik...

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PUM

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Abstract

The invention provides an article transfer vehicle and an article transfer apparatus capable of sharing power between article transfer vehicles. In addition, the invention provides an article transport vehicle and an article transport facility, which can enable the article transport vehicle to operate normally even if a non-power-supply section in which a power supply line formed along a track is not provided is lengthened. According to the invention, even if the power supply from the power supply line is cut off or the power supply line is not arranged along the traveling track, the article conveying vehicle can be normally operated, and the power stored in the storage battery can be relatively easily ensured.

Description

technical field [0001] Embodiments of the present invention relate to an item transfer vehicle and an item transfer device for transferring an item from an arbitrary location to a target location. Background technique [0002] In order to improve the efficiency of semiconductor manufacturing, it is not only used to improve various processes (example: exposure, evaporation, etching, ion implantation, cleaning, etc.) (wafer) containers (containers), etc.) are more efficiently transferred between semiconductor manufacturing equipment. As an example, an article transfer facility including an overhead hoist transport (OHT) configured to move and transfer articles along a transfer path provided on the ceiling side of a semiconductor manufacturing factory is widely used. [0003] The article conveying equipment equipped with an aerial walking unmanned transport vehicle (hereinafter also referred to as OHT.) includes a travel rail (travel rail) that provides a transport path, a veh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H02J9/06H02J7/00H02J50/00
CPCH01L21/67733H02J9/061H02J7/0068H02J50/00H01L21/67727H01L21/6773B60L2200/26B60L53/12B60L53/32B60L53/53B60L58/14B60L1/003Y02T10/70Y02T10/7072Y02T90/12Y02T90/14H01L21/67724H01L21/67706B65G1/0457H02J7/0063H02J50/10H02J7/34B65G2201/0297B65G1/0421B60L5/005B60L58/15B60L2240/54B60L53/122
Inventor 尹基燮
Owner SEMES CO LTD
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