Nanofluidic chip based on nanocracks and processing method thereof

Abstract

The invention provides a nanofluidic chip based on nanocracks and a processing method thereof. The nano-fluidic chip is formed by bonding a polydimethylsiloxane channel layer and a glass substrate, the polydimethylsiloxane channel layer contains a micron channel and at least one nano channel, the nano channel is connected with the micron channel, the tail end of the micron channel is connected with the outside through a liquid storage tank, and the liquid storage tank is used for adding and extracting a nano-fluidic chip sample. The processing method is simple, efficient and rapid processing of a single nano-channel array or a multi-nano-channel array can be achieved, and the length, the position and the size of the nano-channel are accurate and controllable. The problems of long time consumption, high cost, complex operation and the like of a traditional semiconductor processing technology are solved. The processed micro-nano fluidic chip can be used in the fields of biosensing, chemical analysis, micro-nano energy collection and the like based on the nanofluidic technology.

Description

technical field [0001] The invention relates to the field of micro-nano fluidic chip processing, in particular to a nano-crack-based nanofluidic chip and a processing method thereof. The processed micro-nanofluidic chip can be used in fields such as biosensing, chemical analysis, and micro-nano energy collection based on nanofluidic technology. Background technique [0002] Nanofluidic technology studies the transmission, manipulation mechanism and application technology of nanoscale substances such as nanoparticles, small molecules, ions, drug macromolecules, etc. in a space with a scale smaller than 100nm. Nanochannel devices with a structure size of less than 100nm will have many new transport phenomena in the transport of substances in nanopores due to interface electrical phenomena, size steric effects, etc. These new transport phenomena are useful for detecting, manipulating and controlling single nanoscale targets such as Viruses, bacteria, and DNA provide great poss...

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Problems solved by technology

[0003] At present, the conventional processing of nanofluidic chips containing nanochannels still adopts traditional semiconductor processing techniques, such as electron beam lithography, focused ion beam lithography, dry and wet etching, etc., but these methods are still affected by incident light to varying degrees. and photomask resolution limitations, and its high processing cost, strict requirements on the processing environment, low processing efficiency, etc.; new processing technologies such as interference lithography do not need to use complex optical systems or photomasks to achieve large-area Fabricate simple periodic nanoscale structures, but this method cannot realize the prep

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