Drying device

Abstract

Provided is a drier in which compressed air is blown to a substrate carried almost in the horizontal direction by a carrier roll to remove a treating liquid so as to remove the treating liquid without blowing off the liquid. The drier is constituted by being equipped with a carrying means having a carrying passage R to carry a substrate W having liquid films or liquid droplets of the treating liquid 50 on the surfaces Wa, Wb in one direction, a blowing means 10 to blow drying air onto the surfaces Wa, Wb of the substrate W to move the liquid 50 to the upstream side of the carrying direction, and a liquid receiving means 11 which is disposed in contact or near the passage side r1 of the carrying passage R in the upstream side than the blowing means 10 and which receives the liquid 50 on the substrate surfaces Wa, Wb.

Description

technical field [0001] The present invention relates to a drying device for removing a treatment liquid by spraying compressed air onto a substrate conveyed substantially horizontally by conveying rollers. Background technique [0002] Generally, in the manufacturing process of substrates such as liquid crystal displays, it is necessary to dry the wet substrates in the drying tank after cleaning the substrates in the cleaning treatment tank by conveying rollers. Especially in recent years, in order to improve production efficiency, fast and powerful drying processing capabilities are required. Therefore, conventionally, an air-knife drying method in which treatment liquid such as water droplets adhering to the substrate is removed by air blowing has been employed. [0003] The so-called air knife drying method is to arrange a pair of air knives with long openings at the position sandwiched in the vertical direction by placing the substrate on the lower side supported by the...

AI Technical Summary

Problems solved by technology

For this reason, an exhaust device is installed around the air knife to forcibly remove the mist to prevent it from adhering to the substrate again, so that more operating costs are required for forced exhaust.

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