Flexible X-ray reflection type multipayer film broad band poarizer and its preparation method
A multi-layer film and polarizer technology, which is applied in the direction of instruments, scientific instruments, polarizing elements, etc., can solve the problems of inconvenient adjustment and reduction of luminous flux multi-layer films, etc.
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[0027] The material selection principle of the soft X-ray reflective multilayer film broadband polarizer of the present invention is to look for the material pair with the largest refractive index difference between the two materials from the perspective of optics itself, and at the same time, the material has the smallest absorption in a given wavelength band. The invention selects two materials: molybdenum (Mo) and silicon (Si). Using the program compiled by the above method, the thickness of each layer of the multilayer film required for the corresponding wave band is calculated. The thickness is between 0.5 nanometers and 8.5 nanometers. The thickness parameters such as Figure 5b Shown. The present invention is also applicable to other material pair combinations in the soft X-ray band, such as tungsten / carbon, tungsten / silicon, etc.
[0028]The soft X-ray reflection type multilayer film broadband polarizer is prepared, and the magnetron sputtering coating method is used. The J...
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