Flexible X-ray reflection type multipayer film broad band poarizer and its preparation method

A multi-layer film and polarizer technology, which is applied in the direction of instruments, scientific instruments, polarizing elements, etc., can solve the problems of inconvenient adjustment and reduction of luminous flux multi-layer films, etc.

Inactive Publication Date: 2004-12-22
TONGJI UNIV
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Problems solved by technology

[0006] Adjustable angle double multi-layer film polarizer, the use of multi-layer film polarizer has a higher degree of polarization when different wave bands correspond to different angles, using two identical polarizers placed in parallel, while ensuring the direction of the outgoing beam not deflected, as Figure 3a As shown, but in the working process of this type of polarizer, the two polarizers must be rotated precisely corresponding to different wavelength bands at t

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  • Flexible X-ray reflection type multipayer film broad band poarizer and its preparation method
  • Flexible X-ray reflection type multipayer film broad band poarizer and its preparation method
  • Flexible X-ray reflection type multipayer film broad band poarizer and its preparation method

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[0027] The material selection principle of the soft X-ray reflective multilayer film broadband polarizer of the present invention is to look for the material pair with the largest refractive index difference between the two materials from the perspective of optics itself, and at the same time, the material has the smallest absorption in a given wavelength band. The invention selects two materials: molybdenum (Mo) and silicon (Si). Using the program compiled by the above method, the thickness of each layer of the multilayer film required for the corresponding wave band is calculated. The thickness is between 0.5 nanometers and 8.5 nanometers. The thickness parameters such as Figure 5b Shown. The present invention is also applicable to other material pair combinations in the soft X-ray band, such as tungsten / carbon, tungsten / silicon, etc.

[0028]The soft X-ray reflection type multilayer film broadband polarizer is prepared, and the magnetron sputtering coating method is used. The J...

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Abstract

Comparing with prior art, the disclosed wide band polarizer possesses advantages of higher luminous flux, degree of polarization, wider band, simple technique of preparation and easy of adjustment. The invention discloses designing thoughts for polarizer and concrete preparation method as well as optical property of the polarizer calculated under the designing thoughts. The invention is applicable to many polarization measurement areas such as soft X ray magnetic circular or linear dichromatic analysis and soft X ray resonance magnetic scattering.

Description

technical field [0001] The invention relates to a soft X-ray band multilayer film polarization optical element, specifically a soft X-ray reflective multilayer film broadband polarizer, which can be used for soft X-ray magnetic circular dichroism, magnetic line dichroism analysis, and soft X-ray Ray resonance magnetic scattering and many other fields of polarization measurement. Background technique [0002] The soft X-ray band polarizer is a polarizer under the incident condition of the quasi-Brewster angle (due to the absorption of the material, there is no Brewster angle at which the reflectivity of P-polarized light is equal to 0). Figure 1 is a fixed wavelength , Mo / Si multilayer films with slightly different periods R s , R p and R s / R p With the change of incident angle, d=10.1nm multilayer film ( Figure 1a ) exactly matches the quasi-Brewster angle, R s and R s / R p All reach larger values, d=10.5nm multilayer film ( Figure 1b ) does not match the quasi-Br...

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Application Information

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IPC IPC(8): G01J4/00G02B5/30G02B27/28
Inventor 王占山王洪昌
Owner TONGJI UNIV
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