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Storage container

Inactive Publication Date: 2006-04-20
MIRAIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0010] The present invention has been developed in view of the above problems, and accordingly, it is an object of the present invention to provide a storage container whose sealing member is not liable to fall off, and the sealing property of the sealing member is improved.
[0017] The storage container according to the present invention includes a sealing member formed on one of a container main body and a cover member to hermetically seal a space therebetween, which is fitted into a fitting groove formed in one of the container main body and the cover member and includes a plurality of individually deformable portions disposed opposite to each other across a gap secured along the fitting direction in a sectional view, and a sealing piece abutting a wall surface of the other one of the container main body and the cover member, whereby the sealing member is not liable to come off and the sealing property of the sealing member is enhanced.

Problems solved by technology

A variety of devices have been hitherto made on a storage container for storing an electronic part-mounted board such as a semiconductor wafer, a storage disk substrate, or a liquid crystal glass substrate under a clean atmosphere since if any foreign matter or contaminant adheres to such a board in the process of storing, conveying, and processing the board, a thin film or element formed on the surface thereof may be damaged, or element characteristics may be deteriorated.
Hence, the above airtight container is insufficient in terms of the engagement between the endless portion of the sealing member and the fit-retention groove, leading to a problem that the sealing member easily falls off the fit-retention groove.
In this case, when the elasticity of the elastic member forming the endless portion of the sealing member is made too high with a view to enhancing the engagement between the sealing member and the fit-retention groove, there arises a problem that the endless portion is hard to remove from the fit-retention groove.

Method used

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Experimental program
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first embodiment

[0028] Referring to FIG. 2, the storage container of the present invention will be described. FIG. 2 is a sectional view schematically showing the storage container.

[0029] The storage container includes a container main body 1 forming a housing portion (i.e., inner space) 4 having an opening 1a, a cover member 2 for covering the opening 1a of the container main body 1, and a sealing member 3 for keeping the inner space 4 of the container main body 1 airtight with the opening 1a of the container main body 1 being closed with the cover member 2.

[0030] Further, a thin-plate retainer 6 is attached to the inner side of the cover member 2. A thin-plate supporting portion 7 is attached to an inner side face of the container main body 1. The thin-plate retainer 6 and the thin-plate supporting portion 7 are grooved at regular intervals. Thus, when the cover member 2 is put on the container main body while thin plates 8 are held in these grooves, the thin plates 8 can be arrayed in position ...

second embodiment

[0048] Referring next to FIG. 4 and FIGS. 5A and 5B, the present invention is described. FIG. 4 is a schematic enlarged sectional view of a sealing member portion of a storage container according to this embodiment. FIG. 5A illustrates the sealing member 3 not fitted into the fitting groove 5. FIG. 5B illustrates the sealing member 3 fitted into the fitting groove 5 with the cover member 2 put on the container main body 1.

[0049] Similar to the first embodiment, the sealing member 3 of this embodiment is composed of the individually deformable portions 9a, 9b fitted into the fitting groove 5 formed on one of the container main body 1 and the cover member 2, the coupling portion 10 connecting the individually deformable portions 9a and 9b and fitted into the fitting groove 5, and the sealing piece 11 for sealing the gap in abutment with the wall surface of the other one of the container main body 1 and the cover member 2. The sealing piece 11 is integrated with one of the individually...

third embodiment

[0057] Referring next to FIG. 6, the present invention is described. FIG. 6 is a schematic enlarged sectional view of a sealing member portion of a storage container according to this embodiment.

[0058] In this embodiment, a fitting member 17 is fitted in between the individually deformable portions 9a and 9b of the sealing member 3 of the second embodiment. The fitting member 17 includes a bulging portion 18a inserted between the individually deformable portions 9a and 9b, and a retainer 18b abutting against the end of one of the individually deformable portions 9a and 9b, which does not have the integrally formed sealing piece 11, that is, the individually deformable portion 9b. The bulging portion 18a and the retainer 18b are integrally formed.

[0059] The bulging portion 18a of the fitting member 17 is inserted between the individually deformable portions 9a and 9b, so the individually deformable portions 9a and 9b are pushed outward against the wall surface of the fitting groove ...

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PUM

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Abstract

To prevent a sealing member from falling off, facilitate attachment of the sealing member, and improve the sealing property of the sealing member. The sealing member of the present invention includes a plurality of individually deformable portions fitted into fitting groove portions separated across a protrusion in the fitting groove formed in one of a container main body and a cover member, a coupling portion connecting the individually deformable portions, and a sealing piece abutting against a wall surface of the other one of the container main body and the cover member to seal a space, the sealing piece being integrated with the coupling portion connecting the individually deformable portions. Convex ribs are respectively formed on opposite sides of the individually deformable portions to elastically come into close contact with the wall surface of the protrusion.

Description

CROSS-REFERENCE TO RELATED APPLICATION [0001] This application claims, under 35 USC 119, priority of Japanese Application No. 2004-300587 filed Oct. 14, 2004. BACKGROUND OF THE INVENTION [0002] 1. Field of the Invention [0003] The present invention relates to a storage container for storing, conveying, and processing an electronic part-mounted board that should be kept clean during storage, such as a semiconductor wafer, a storage disk substrate, or a liquid crystal glass substrate. [0004] 2. Description of the Related Art [0005] A variety of devices have been hitherto made on a storage container for storing an electronic part-mounted board such as a semiconductor wafer, a storage disk substrate, or a liquid crystal glass substrate under a clean atmosphere since if any foreign matter or contaminant adheres to such a board in the process of storing, conveying, and processing the board, a thin film or element formed on the surface thereof may be damaged, or element characteristics may...

Claims

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Application Information

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IPC IPC(8): B65D53/00B65D43/04
CPCF16J15/025F16J15/061F16J15/062H01L21/67376H01L21/67763H01L21/67766H01L21/67769B65D53/02B65D53/04
Inventor MATSUTORI, CHIAKIOBAYASHI, TADAHIRO
Owner MIRAIAL CO LTD