An
ion source capable of different operation
modes is disclosed. A
vaporizer communicates with the
ion source. The
ion source can have a plurality of gas inlets communicating with different gases. When operating in the first mode, the
ion source can supply a first gas, such as an
inert gas, while heating the
vaporizer. When operating in the second mode, the
ion source can supply a second gas, and the second gas can be an organoaluminum gas. When operating in the third mode, the
ion source can supply the second gas while heating the
vaporizer. Ions having a single charge can be generated in the first and second
modes, while ions having multiple charges can be generated in the third mode.