Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system

A variable capacitance and automatic adjustment technology, applied in the field of lasers, can solve problems such as high price, and achieve the effect of simplifying the device, reducing measurement parameters, and reducing costs

Inactive Publication Date: 2009-04-29
江苏新潮创新投资集团有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the measured RF power amplitude and phase of the RF discharge plasma input point are very effective for matching, the measuring instrument is a network analyzer based on large-scale integrated circuit technology, which is expensive

Method used

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  • Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system
  • Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system
  • Automatic adjusting device and method of the variable capacitor of the RF board bar CO2 laser matching system

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Embodiment Construction

[0016] The invention relates to a radio frequency slat CO 2 The automatic adjustment device and method of the variable capacitor of the laser matching system, the adjustment device structure is as figure 1 As shown, it is mainly composed of radio frequency source 1, microwave detector 2, small signal amplifier circuit 3, PLC 4, stepper motor 5, impedance matcher 6, radio frequency slat CO 2 Laser 7, coaxial cable 8, variable capacitance C 1 And C 2 And inductance L. The variable capacitor C 1 And C 2 The positive pole of the inductor is connected with the inductor L, and the variable capacitor C 1 Is connected to the 50Ω coaxial cable 8 and the variable capacitor C 2 Positive pole with RF lath CO 2 The electrodes of the laser 7 are connected, and the variable capacitor C 1 And C 2 The negative pole of is grounded to form a π-type network impedance matcher 6. Connect the coaxial cable 8 to the output end of the radio frequency source 1, and connect the reflected power monitoring e...

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Abstract

This invention relates to radio board bar CO2 laser matching system changeable capacitor automatic adjusting device and method, wherein, the device comprises variable capacitor C1 and C2, sensor L, co-axis cable, radio board bar CO2 laser, radio source, microwave tester, small signal amplifying circuit, PLC and step in motor. The invention method comprises the following steps: a, radio source inputs radio impulse with space occupancy less than 20 percent and laser starts and the step motor adjusts capacitor in front and back by speed of 50 to 70; radio source inputs power radio impulse for 40 to 60 percent.

Description

Technical field [0001] The invention relates to a radio frequency slat CO 2 Lasers, especially related to a radio frequency slat CO 2 Automatic adjustment device and method of laser matching system. It belongs to the field of laser technology. Background technique [0002] RF slat CO 2 The laser consists of two variable capacitors C 1 , C 2 A π-type network impedance converter is formed with an inductor L, which transforms the plasma impedance of the laser into a 50Ω characteristic impedance of the coaxial cable connected to the radio frequency power supply, thereby realizing the reflection-free transmission of radio frequency energy from the radio frequency source to the laser. In the national invention patent application (200610098045.2) "Pulse radio frequency slat CO 2 In the "Laser ignition and stable discharge method", the variable capacitor C of the π-type network 2 After inputting a low-duty ratio RF pulse, after the laser is ignited, and after inputting a 50% duty-cycle f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/0975H01S3/097H01S3/09H01S3/10
Inventor 高允贵胡浩丁义国李向阳顾鸿璋朱永祥牟文智张龙华
Owner 江苏新潮创新投资集团有限公司
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