The invention discloses a metal organic chemical gas-phase sedimentary equipment transmitted by liquid, which comprises the following parts: multi-element gasifying component, reacting chamber, RF discharge plasmid, vacuum component, operational prevention and draining disposing component and electric control component, wherein the multi-element gasifying component is composed of multi-path liquid transmission channels, two-path gas transmission channel, atomizer, carburetor, valve and pipe; the liquid is atomized and carbureted, which is transmitted into reacting chamber to react with gas to produce needed oxide; the sediment forms film on the substrate, whose temperature is controllable; the electric control component realizes self-control of whole technology through programmable controller PLC.