Device and method for controlling radio frequency jet flow length through auxiliary discharge

An auxiliary discharge and radio frequency technology, applied in the direction of electrical components, plasma, etc., can solve the problems of limiting the effect of radio frequency jet, short distance of radio frequency jet, consumption of carrier gas, etc., to save vacuum equipment, high active particle concentration, increase Effect of RF Discharge Intensity

Inactive Publication Date: 2018-11-16
DONGHUA UNIV
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AI Technical Summary

Problems solved by technology

[0006] Traditional RF plasma jets are usually composed of single or double electrodes, and the RF jet distance generated at the nozzle is short, which limits the effect of RF jets
In most cases, the method of increasing the length of the plasma jet is by increasing the flow rate of the discharge gas, which consumes a large amount of carrier gas

Method used

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  • Device and method for controlling radio frequency jet flow length through auxiliary discharge
  • Device and method for controlling radio frequency jet flow length through auxiliary discharge
  • Device and method for controlling radio frequency jet flow length through auxiliary discharge

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Embodiment

[0025] Such as figure 1 As shown, a device for controlling the length of the radio frequency jet through auxiliary discharge provided by the present invention is a plasma jet reactor, which includes a discharge chamber 1 filled with discharge gas, and one end of the discharge chamber 1 is The air inlet 5 and the other end is an air outlet 6. A high-voltage electrode 2, a ground electrode 3, and a radio frequency electrode 4 are sequentially arranged on the discharge chamber 1 along the gas flow direction. The discharge chamber 1 is a quartz tube with a circular cross section, an inner diameter of 3-7 mm, a wall thickness of 1 mm, and a length of 500 mm. The dimensions of high voltage electrode 2, ground electrode 3 and radio frequency electrode 4 are all 100mm×5mm×0.15mm; the distance between high voltage electrode 2 and ground electrode 3 is 1-10cm (adjustable), and the distance between ground electrode 3 and radio frequency electrode 4 The distance between them is 0.5-1cm (...

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Abstract

The present invention discloses a device and a method for controlling radio frequency jet flow length through auxiliary discharge. The device is a dielectric barrier discharge plasma reactor and comprises a discharge cavity filled with discharge gases, one end of the discharge cavity is provided with an air inlet, the other end of the discharge cavity is provided with an air outlet, the dischargecavity is provided with a high-voltage electrode, a grounding electrode and a radio-frequency electrode in order in a gas flow direction. The method comprises the steps of: inletting the discharge gases into the discharge cavity through the air inlet, the radio-frequency electrode is connected with a radio-frequency alternating current to allow the discharge gases to generate plasma jet between the grounding electrode and the radio-frequency electrode, and the high-voltage electrode is connected with a high-voltage source to generate the plasma jet between the high-voltage electrode and grounding electrode. The device and the method for controlling radio frequency jet flow length through auxiliary discharge can effectively add the radio-frequency discharge intensity and the length of the radio frequency jet and can change the intensity of the pulse plasma so as to achieve change of the length of the radio frequency jet.

Description

technical field [0001] The invention relates to the technical field of atmospheric pressure glow discharge, in particular to a method for atmospheric pressure pulse coordinated radio frequency glow jet discharge. Background technique [0002] The plasma jet is a kind of plasma generated in a small discharge space, and the plasma is driven by various excitation sources to reach the external open space through the nozzle. Compared with the traditional plasma, the plasma jet has the following characteristics and advantages: [0003] (1) The plasma jet device under atmospheric pressure is simple, does not need to draw a vacuum, and can generate plasma with uniform discharge under atmospheric pressure. [0004] (2) Plasma close to room temperature can be generated in an open space, instead of being confined in a narrow discharge space like traditional atmospheric pressure plasma generation methods (such as capacitive coupling discharge, etc.). [0005] The plasma generated at t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/24
CPCH05H1/2406
Inventor 郭颖韩乾翰石建军张菁
Owner DONGHUA UNIV
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