Device and method for controlling radio frequency jet flow length through auxiliary discharge
An auxiliary discharge and radio frequency technology, applied in the direction of electrical components, plasma, etc., can solve the problems of limiting the effect of radio frequency jet, short distance of radio frequency jet, consumption of carrier gas, etc., to save vacuum equipment, high active particle concentration, increase Effect of RF Discharge Intensity
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[0025] Such as figure 1 As shown, a device for controlling the length of the radio frequency jet through auxiliary discharge provided by the present invention is a plasma jet reactor, which includes a discharge chamber 1 filled with discharge gas, and one end of the discharge chamber 1 is The air inlet 5 and the other end is an air outlet 6. A high-voltage electrode 2, a ground electrode 3, and a radio frequency electrode 4 are sequentially arranged on the discharge chamber 1 along the gas flow direction. The discharge chamber 1 is a quartz tube with a circular cross section, an inner diameter of 3-7 mm, a wall thickness of 1 mm, and a length of 500 mm. The dimensions of high voltage electrode 2, ground electrode 3 and radio frequency electrode 4 are all 100mm×5mm×0.15mm; the distance between high voltage electrode 2 and ground electrode 3 is 1-10cm (adjustable), and the distance between ground electrode 3 and radio frequency electrode 4 The distance between them is 0.5-1cm (...
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