A device and method for assisting radiofrequency glow discharge of a flat plate by an atmospheric pressure pulse

Abstract

The invention discloses a device and method for assisting the RF glow discharge of a flat plate by an atmospheric pressure pulse. The device is a plasma discharge reactor, which comprises a dischargechamber filled with a discharge gas; An air inlet is arranged at the top of the discharge chamber, an upper electrode connected with a high-voltage power source and a lower electrode connected with aradio frequency power source are arranged in the discharge chamber, a pair of dielectric plates distributed up and down are arranged between the upper electrode and the lower electrode, the upper dielectric plate is connected with the upper electrode, and the lower dielectric plate is connected with the lower electrode. The method comprises the following steps: the discharge gas is introduced intothe discharge chamber from the air inlet, and the upper electrode is connected with a pulse power supply to form pulse discharge; after the pulse discharge is finished, pulse modulated RF alternatingcurrent flows through the lower electrode so as to generate RF discharge between the dielectric plates. The invention utilizes the active particles generated in the pulse discharge to assist the radio frequency discharge to start glow, reduces the glow time and the maintenance voltage of the glow time.

Description

technical field [0001] The invention relates to the technical field of normal pressure glow discharge, in particular to a method for normal pressure pulse-assisted radio frequency glow discharge of a flat panel. Background technique [0002] In gas discharge, glow discharge is the main discharge form and object of research. Its discharge current density is low, and the discharge area presents a glow. Glow discharge is an important phenomenon in the gas discharge phenomenon, which has a wide range of applications in many different fields, such as plasma etching, thin film deposition and surface treatment of materials. The low temperature and atmospheric pressure glow discharge is more widely used in practical applications due to its non-vacuum system and easy formation. [0003] Since the normal pressure radio frequency discharge is a continuous discharge, its power dissipation is relatively high, and the plasma temperature is too high. In order to avoid these shortcomings ...

AI Technical Summary

Problems solved by technology

In the general radio frequency pulse segment discharge, the discharge still has the advantages of normal pressure radio frequency discharge, and due to the intervention of the pulse signal, the power dissipation is reduced and the heat accumulation generated by continuous discharge is reduced, but the disadvantage is that each segment of discharge is Need to go through a discharge start, which invisibly increases energy consumption. Since the start process requires a relatively high voltage, it is easy to cause the conversion of the discharge mode and cause the discharge to be unstable.

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