Radio-frequency micro-discharge long-scale plasma generating device and method

A plasma and generating device technology, which is applied in the direction of plasma, etc., can solve the problems of too short plasma length and uneven plasma density in the axial direction, and achieve the effect of uniform discharge in the axial direction.

Inactive Publication Date: 2019-05-17
DALIAN UNIV OF TECH
View PDF10 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a radio frequency micro-discharge long-scale plasma generation device and method to solve the problems of too short plasma length and axial non-uniformity of plasma density during medium and high pressure discharge

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Radio-frequency micro-discharge long-scale plasma generating device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] It is to be understood that the terms "front", "rear", "left", "right", "upper", "lower", "top", "bottom", "inner", "outer" etc. indicate an orientation or The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific o...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a radio-frequency micro-discharge long-scale plasma generating device and method. The radio-frequency micro-discharge long-scale plasma generating device comprises a quartz tube; one end of the quartz tube is sealed and connected with an air inlet vacuum chamber, and the other end of the quartz tube is sealed and connected with an air outlet vacuum chamber; a grounding electrode, a high-voltage electrode and a discharge coil are sequentially sleeved on the quartz tube in a direction from the air inlet vacuum chamber to the air outlet vacuum chamber; the high-voltage electrode is connected to the near-end of the discharge coil; the high-voltage electrode is connected to a radio-frequency power supply system through a coaxial transmission line; and the grounding electrode and the far-end of the discharge coil are connected to a common ground. The invention combines two discharge forms of a plate electrode and a discharge coil, and a discharge coil is added downstream of the high-voltage electrode; therefore, the stability and plasma spacing at medium and high atmospheric pressures during radio-frequency discharge are improved; so that the invention can realizethe generation and maintenance of the plasma with a long-scale and uniform axial direction discharge under a small airflow and a small radio-frequency power under medium and high atmospheric pressures.

Description

technical field [0001] The invention relates to the technical field of radio-frequency discharge ion plasma generation devices, in particular to a radio-frequency micro-discharge long-scale plasma generation device and method. Background technique [0002] The plasma generated by radio frequency discharge is widely used, such as low pressure and large area radio frequency discharge, which can be used for chip etching, thin film deposition and ion source supply, etc.; and the radio frequency discharge of medium and high pressure includes radio frequency plasma torch and atmospheric pressure plasma jet Wait. [0003] Atmospheric pressure radio frequency plasma jet. The general implementation method is to wind a discharge coil or use a flat electrode outside a very small quartz tube, and then pass a large flow of working gas inside the quartz tube. When the radio frequency voltage is passed through the discharge coil or the flat electrode, the quartz tube Plasma is generated ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/46
Inventor 高飞黄就欢王友年
Owner DALIAN UNIV OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap