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Diagnostic device of radio frequency discharge plasma

A plasma and diagnostic device technology, applied in the direction of plasma, electrical devices, discharge tubes, etc., can solve problems such as radio frequency disturbances, and achieve the effect of small discharge disturbances

Inactive Publication Date: 2011-10-05
DALIAN UNIV OF TECH
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a radio frequency discharge plasma diagnostic device to solve the problem of radio frequency disturbance when diagnosing radio frequency discharge plasma, especially when more than two radio frequency discharge plasmas are simultaneously discharged

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  • Diagnostic device of radio frequency discharge plasma
  • Diagnostic device of radio frequency discharge plasma
  • Diagnostic device of radio frequency discharge plasma

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Embodiment Construction

[0019] Specific embodiments of the present invention will be described in detail below in conjunction with technical solutions and accompanying drawings.

[0020] exist figure 1 Among them, the detector is composed of probe 1, base electrode 2 and reference electrode 3; probe 1 is a copper wire with a diameter of 0.5 mm and a length of 1 mm, and the base electrode 2 is a ring with a diameter of 30 mm made of a 2 mm thick copper wire. The area of ​​the base electrode 2 is about 335 times the area of ​​the probe 1, and the reference electrode 3 is a copper wire with a diameter of 0.5 mm; the probe 1 is located at the center of the ring-shaped base electrode 2, and the reference electrode 3 is located outside the ring of the base electrode 2; the probe 1, The base electrode 2 and the reference electrode 3 are led out through the insulating sleeve 5 through the lead wire 4 .

[0021] exist figure 2 In the process, a radio frequency discharge occurs between the discharge electro...

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Abstract

The invention relates to a diagnostic device of radio frequency discharge plasma, belonging to the plasma science and technology field and being used for diagnosing radio frequency discharge plasma. The diagnostic device can overcome radio frequency discharge especially radio frequency disturbance existed in the simultaneous discharge of three or more radio frequency and obtain parameters such as electron density, electron temperature and the like. The diagnostic device of radio frequency discharge plasma comprises a detector and a servo system, wherein the detector is composed of a metallic probe, a base electrode and a reference electrode; the base electrode is annular and arranged parallel to the equipotential surface of the discharge electric field of the place where the base electrode locates in; the probe is locate in the center of the annular base electrode; the reference electrode can locate in any position of the plasma; the surface area of the base electrode is 300 times larger than the surface area of the probe; and the servo system is composed of a computer, a data collection card, a sawtooth wave generator and an interface circuit; and the servo system does not share a power source with discharge equipment and does not share a land with discharge loop. Sawtooth wave scan voltage generated by a sawtooth wave generator is added between the probe and the base electrode. The potential of the probe is calculated with the potential of the reference electrode as reference.

Description

technical field [0001] The invention belongs to the field of plasma science and technology, and relates to a radio frequency discharge plasma diagnosis device, which can overcome radio frequency discharge, especially the radio frequency disturbance existing when more than two radio frequencies are simultaneously discharged, and obtain parameters such as electron density and electron temperature. Background technique [0002] Probes are commonly used devices for diagnosing plasma parameters. When a common probe is used to diagnose radio frequency discharge plasma, the volt-ampere characteristic curve of the probe will be distorted due to radio frequency disturbance, which will give wrong diagnostic results. For single-frequency radio frequency disturbances, the usual solution is to install radio frequency choke coils and auxiliary electrodes in the probe circuit to attenuate radio frequency disturbances, or use external circuits to sample radio frequency signals, and then fee...

Claims

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Application Information

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IPC IPC(8): G01K7/00H01J37/32G01R19/00H05H1/00
Inventor 陆文琪王友年邓新绿徐军董闯
Owner DALIAN UNIV OF TECH
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