Actuator, optical scanner and image forming device
A technology of optical scanners and actuators, applied in optics, optical components, electrical recording technology using charge patterns, etc., can solve problems such as difficulty in exerting scanning characteristics, changes in optical path length, and inability to scan reflected light.
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no. 1 example
[0058] First, the first embodiment of the actuator of the present invention will be described.
[0059] figure 1 It is a perspective view showing the first embodiment of the actuator of the present invention, figure 2 yes figure 1 A cross-sectional view of the A-A line in, image 3 is applied as figure 1 A schematic diagram of an example of a voltage waveform of a piezoelectric element included in the actuator shown. In addition, below, for the convenience of explanation, the figure 1 The outer side of the paper in is called "upper", the inner side of the paper is called "lower", the right side is called "right", the left side is called "left", and, figure 2 The upper side is called "upper", the lower side is called "lower", the right side is called "right", and the left side is called "left".
[0060] The actuator 1 includes: a substrate 2, with such as figure 1 A two-degree-of-freedom vibration system shown;
[0061] Such as figure 1 As shown, the base body 2 has ...
no. 2 example
[0121] Next, a second embodiment of the actuator of the present invention will be described.
[0122] Figure 4 It is a plan view showing the second embodiment of the actuator of the present invention, Figure 5 yes Figure 4 Sectional view of line B-B in . In addition, for the sake of illustration, the Figure 5 The upper side in is called "upper", and the lower side is called "lower".
[0123] In the following, description will be made centering on the differences between the actuator 1A of the second embodiment and the actuator 1 of the first embodiment described above, and descriptions of overlapping parts will be omitted.
[0124]The actuator 1A according to the second embodiment of the present invention is substantially the same as the actuator 1 of the first embodiment except that the shapes of the piezoelectric elements 51A to 54A are different. Also, the same reference numerals are attached to the same structures as those of the first embodiment described above. ...
no. 3 example
[0132] Next, a third embodiment of the actuator of the present invention will be described.
[0133] Figure 6 It is a plan view showing the third embodiment of the actuator of the present invention, Figure 7 yes Figure 6 The profile of the C-C line in, Figure 8 is a diagram for explaining piezoelectric elements, Figure 9 It is a schematic diagram showing an example of the voltage applied to the piezoelectric element. In addition, for the sake of illustration, the Figure 7 The upper side in is called "upper", and the lower side is called "lower".
[0134] In the following, description will be made centering on differences between the actuator 1B of the third embodiment and the actuator 1 of the first embodiment described above, and descriptions of overlapping parts will be omitted.
[0135] The actuator 1B according to the third embodiment of the present invention is substantially the same as the actuator 1 of the first embodiment except for the structure and arrang...
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