Corrugated pipe elastic element based precision micro- displacement hydraulic scaling device

A technology of elastic elements and bellows, applied in the field of precision micro-displacement hydraulic scaling mechanisms, can solve the problems of difficulty in crawling, difficulty in improving resolution and precision, friction, etc., and achieve the effect of eliminating crawling.

A technology of elastic elements and bellows, applied in the field of precision micro-displacement hydraulic scaling mechanisms, can solve the problems of difficulty in crawling, difficulty in improving resolution and precision, friction, etc., and achieve the effect of eliminating crawling.

CN101235790BInactive Publication Date: 2011-05-11NANJING INST OF ASTRONOMICAL OPTICS & TECH NAT ASTRONOMICAL OBSE
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  • Corrugated pipe elastic element based precision micro- displacement hydraulic scaling device
  • Corrugated pipe elastic element based precision micro- displacement hydraulic scaling device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0012] Embodiment 1, a precision micro-displacement hydraulic scaling mechanism based on bellows elastic elements, referring to Figure 2: the whole mechanism consists of an output end 12, a damping plate 13, hydraulic oil 14, a large bellows 15, a coupling 16, a flange 17, a tight Fixed screw 7, small bellows 8, actuator input end 9, sealing cover 10, sealing ring 11. The output end 12 and one end of the large bellows 15 are sealed and welded together, and the other end of the large bellows 15 and one end of the coupling 16 are sealed and welded together. There is a small hole in the center of the damping plate 13, and the outer circle of the damping plate 13 is sealed. Welded on the inner cavity of the coupling 16, one end of the small bellows 8 is seal-welded on the end face of the flange 17, the other end of the small bellows 8 is seal-welded on the end face of the sealing cover 10, and the flange 17 is connected to the flange 17 through the screw 7. The coupling 16 is conn...

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Abstract

A precise micrometric displacement hydraulic zooming mechanism based on bellow elastic element is disclosed, which is characterized in that two bellows whose two equivalent diameters are D and d separately are coupled through a coupler, the end hole of one end of two bellows is sealed and the other end of two bellows interconnects a cavity of the bellows through a coupler, the bellow cavity is full of hydraulic dielectric and a resistant piece is arranged in the cavity of two bellows connection part. The precise zooming device has no friction, no delay, no return gap for micrometric grade small-stroke displacement, which is fit for optical mirror split, nanometer resolution precise movement and drive on the micrometer grade stroke of hyper-precise manufacture industry. The entire movementof the invention is produced depended on elastic deformation of the bellow completely without friction, which eliminates climbing phenomenon due to friction. The structure of the zooming mechanism can obtain the nanometer grade displacement resolution and precision and the function of the damping fin is to avoid the occurrence of shock. The shape and size of the damping fin can be changed to change the damping factor.

Description

technical field [0001] The invention relates to a precision mechanical device, in particular to a precision micro-displacement hydraulic scaling mechanism based on a bellows elastic element, which is suitable for optical mirror splicing of astronomical telescopes, and the ultra-finishing industry requires nanometer resolution on millimeter strokes precision motion drive. Background technique [0002] With the continuous increase of the caliber of astronomical telescopes, the single main mirror is also getting bigger and bigger. However, due to the limitation of the technical level, the processing and grinding of a single large-aperture mirror is becoming more and more difficult, and it has become a key to realize large-aperture astronomical telescopes. problem. However, with the emergence of spliced ​​mirror active optics technology, this problem has been overcome. The so-called splicing mirror active optical technology is to splice small sub-mirrors into an equivalent lar...

Claims

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Application Information

Patent Timeline
11 May 2011
Publication
CN101235790B
IPC
F15B15/00; F03C99/00
Inventors
李国平; 汪涛