Atomosphere gas dew point control apparatus
An atmosphere gas and control device technology, which is applied in the field of dew point control devices of atmosphere gas, can solve the problems of easily changing dew point, influence of electrical characteristics of electronic components, etc., and achieve the effect of stable electrical characteristics and good firing quality.
Active Publication Date: 2010-12-22
NGK INSULATORS LTD
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Problems solved by technology
Even in this case, if only the outside air is introduced into the furnace, the concentration of water vapor in the atmosphere changes according to the season and climate, so it may have a bad influence on the electrical characteristics of the fired electronic components.
Therefore, it is desirable to control the dew point of the atmosphere gas by humidifying the dry air to a constant level. However, in the case of an oxidizing atmosphere, as in the case of a reducing atmosphere, there is a problem that the dew point tends to fluctuate in the prior art.
Method used
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Embodiment Construction
[0022] Hereinafter, the best mode for carrying out the present invention will be described.
[0023] figure 1 It is a schematic cross-sectional view of a reducing atmosphere firing furnace. In this embodiment, the atmosphere firing furnace is a tunnel furnace and is a roller hearth furnace including a plurality of rollers 1 . The product to be fired is loaded into the furnace from the entrance on the left, fired while being conveyed at a constant speed by the roller 1, and then taken out from the exit on the right. In addition, the conveyance method is not limited to a roller, Of course, other well-known conveyance methods, such as a trolley method and a pusher method, can also be used.
[0024] The furnace is divided into a plurality of regions along the length direction of the furnace by the partition 7, and is set as figure 1 The temperature curve shown in the upper paragraph. Furnace injection holes 2 for atmospheric gas are provided in each region, and reducing atmos...
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The invention provides an atmosphere gas dew point control apparatus capable of controlling the atmosphere gas dew point accurately, controlling the dew point blow water temperature easily; and controlling the equipment cost and operation cost. The apparatus in the invention comprises: a gasifier with a gasification nozzle for spraying and gasifying the water using the pressure of the atmosphere gas infused in the furnace; a flow control device for the atmosphere gas infused in the furnace; and a flow control device for the water supplied to the gasification nozzle. The water flow control device has the function of supplying the water volume, which is calculated according to the atmosphere gas flow infused in the furnace and the dew point to be set, into the gasification nozzle; thus, theatmosphere gas dew point is controlled accurately; while the atmosphere gas has reductibility or oxidizability.
Description
technical field [0001] The present invention relates to a device for controlling the dew point of an atmosphere gas suitable for an atmosphere firing furnace used for firing electronic components and an atmosphere drying furnace used for drying electronic components and the like. Background technique [0002] An atmosphere firing furnace is used for firing ceramics for electronic components such as barium titanate and strontium titanate. When an easily oxidizable electrode such as a copper electrode or a nickel electrode is used as an electronic component, it is necessary to perform firing in a non-oxidizing atmosphere in order to prevent oxidation of the electrode. Therefore, nitrogen gas to which hydrogen gas is added is often used as the atmospheric gas injected into the furnace, and it is injected from an injection hole in the furnace to perform reducing atmosphere firing. [0003] However, when the firing is performed in a reducing atmosphere where the oxygen concentra...
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IPC IPC(8): F27D7/02F27B9/04F27B9/30F26B21/08
Inventor竹田孝广
OwnerNGK INSULATORS LTD