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Substrate conveying device

A technology for conveying devices and substrates, applied in the direction of conveyors, transportation and packaging, conveyor objects, etc., can solve problems such as roller friction marks

Inactive Publication Date: 2009-04-15
OLYMPUS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, since the conveyance of the former glass substrate uses a pair of supporting roller mechanisms and a pair of restricting roller mechanisms, if the glass substrate is conveyed at high speed, the friction of the rollers will occur on the rolling surface of the glass substrate in contact with the rollers. trace

Method used

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Examples

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Embodiment Construction

[0024] Next, a first embodiment of the present invention will be described with reference to the drawings.

[0025] Fig. 1 is a plan view of a substrate (substrate) transfer device applied to inline inspection in FPD processes such as large LCDs and PDPs, and Fig. 2 is a side view of the same device.

[0026] A substrate loading table 1 for carrying in is set on a vibration damping table 2 . The substrate loading table 1 loads the glass substrate 3 carried in, and its width (direction perpendicular to the conveyance direction C) is formed to be slightly shorter than the width of the glass substrate 3 . On the upper surface of the substrate loading table 1, a plurality of air holes 4 are provided, which are also used for air blowing and suction. In addition, these air holes 4 may be provided substantially regularly over the entire surface of the substrate loading table 1 . On the substrate stage 1, two grooves 5 are formed in a direction parallel to the conveyance direction C...

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PUM

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Abstract

The present invention provides a substrate conveying device, wherein air is blown up through a plurality of air holes (4, 18, 12) formed in substrate placing tables (1, 16) and a floating block (11) to float a glass substrate (3), and the floated glass substrate (3) is conveyed while the both tip ends thereof are suckingly held and pulled in conveying direction (C).

Description

[0001] This application is a divisional case of an invention patent application with an application date of April 16, 2003, an application number of 03808707.3, and an invention title of "substrate conveying device". technical field [0002] The present invention relates to a substrate conveying apparatus that floats a glass substrate (substrate) used for, for example, a large liquid crystal display (hereinafter, abbreviated as LCD) and a plasma display panel (hereinafter, abbreviated as LCD) on a conveying path to convey the substrate. flat panel display (hereinafter, abbreviated as FPD) such as PDP). Background technique [0003] In recent years, the size of glass substrates to be processed in the FPD manufacturing process in the FPD field tends to increase in size in order to meet the requirements for larger screen size and cost reduction. As a method of transporting a large glass substrate in the FPD manufacturing process, a roll transport mechanism using rollers is know...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G51/03B65G49/06H01L21/677
CPCB65G2249/04B65G51/03B65G49/065H01L21/67784B65G49/06H01L21/68
Inventor 安田守藤崎畅夫
Owner OLYMPUS CORP