Substrate conveying device
A technology for conveying devices and substrates, applied in the direction of conveyors, transportation and packaging, conveyor objects, etc., can solve problems such as roller friction marks
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[0024] Next, a first embodiment of the present invention will be described with reference to the drawings.
[0025] Fig. 1 is a plan view of a substrate (substrate) transfer device applied to inline inspection in FPD processes such as large LCDs and PDPs, and Fig. 2 is a side view of the same device.
[0026] A substrate loading table 1 for carrying in is set on a vibration damping table 2 . The substrate loading table 1 loads the glass substrate 3 carried in, and its width (direction perpendicular to the conveyance direction C) is formed to be slightly shorter than the width of the glass substrate 3 . On the upper surface of the substrate loading table 1, a plurality of air holes 4 are provided, which are also used for air blowing and suction. In addition, these air holes 4 may be provided substantially regularly over the entire surface of the substrate loading table 1 . On the substrate stage 1, two grooves 5 are formed in a direction parallel to the conveyance direction C...
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