Interferometer with adjustable dynamic range
A dynamic range, interferometer technology, applied in the field of interferometers, can solve the problems of complex system structure and data processing, and achieve the effects of continuously adjustable dynamic range, high measurement accuracy, and simple system structure and data processing.
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[0029] Such as figure 1 As shown, the present invention mainly consists of a light source 1, an illumination system 2, a beam expander collimation system 3, a beam splitting system 4, a Fizeau flat plate 5, a PZT precision tilt table 6, a standard lens 7, an optical element under test 8, and a clamping adjustment system 9. Composed of computer control and data processing system 10 and imaging system 11. The light source 1 adopts a frequency-stabilized He-Ne laser or a semiconductor laser. After the illumination system 2 performs light intensity homogenization and coherence suppression, it enters the beam expander collimation system 3, and enters the Fizeau plate 5 through the beam splitting system 4. The light enters the Fizeau plate 5. After the plate 5 is divided into the reference light that continues to propagate toward the optical element under test 8 and the test light that propagates in the opposite direction, a part of the reference light enters the imaging system 11 t...
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