Interferometer with adjustable dynamic range

A dynamic range, interferometer technology, applied in the field of interferometers, can solve the problems of complex system structure and data processing, and achieve the effects of continuously adjustable dynamic range, high measurement accuracy, and simple system structure and data processing.

Inactive Publication Date: 2012-01-04
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

The dual-wavelength interferometer with dual light sources can effectively improve the dynamic range of the interferometer, but its system structure and data processing are more complicated

Method used

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  • Interferometer with adjustable dynamic range
  • Interferometer with adjustable dynamic range
  • Interferometer with adjustable dynamic range

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Embodiment Construction

[0029] Such as figure 1 As shown, the present invention mainly consists of a light source 1, an illumination system 2, a beam expander collimation system 3, a beam splitting system 4, a Fizeau flat plate 5, a PZT precision tilt table 6, a standard lens 7, an optical element under test 8, and a clamping adjustment system 9. Composed of computer control and data processing system 10 and imaging system 11. The light source 1 adopts a frequency-stabilized He-Ne laser or a semiconductor laser. After the illumination system 2 performs light intensity homogenization and coherence suppression, it enters the beam expander collimation system 3, and enters the Fizeau plate 5 through the beam splitting system 4. The light enters the Fizeau plate 5. After the plate 5 is divided into the reference light that continues to propagate toward the optical element under test 8 and the test light that propagates in the opposite direction, a part of the reference light enters the imaging system 11 t...

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Abstract

The invention discloses an interferometer with an adjustable dynamic range, which comprises a light source, an illumination system, a beam expansion collimation system, a light splitting system, an imaging system, a PZT precision tiltboard, a Fizeau flat plate, a standard lens, a tested optical element, a mounting and clamping regulation system and a computer control and data processing system. Phase shift related to a spatial position occurs to inclination between tested light and reference light beams among CCD pixels, an angle of inclination of the Fizeau flat plate arranged on the PZT precision tiltboard is controlled by a computer so as to control the spatial frequency of generated carrier frequency interferograms, and various algorithms, such as a Fourier transform-based algorithm, a spatial phase-shift algorithm and the like, are adopted to perform phase resolution. For the carrier frequency interferograms of different kinds of spatial frequency, the algorithms suitable for frequency characteristics of the spatial frequency of the carrier frequency interferograms are adopted to perform optimal phase shift resolution, so that a phase extraction algorithm works in an optimal range to further realize high-precision phase resolution. The interferometer of the invention has the adjustable dynamic range, relatively larger dynamic range, relatively higher measurement precisionand relatively greater application value.

Description

technical field [0001] The invention relates to an interferometer with adjustable dynamic range, which belongs to the technical field of advanced optical manufacturing and detection. technical background [0002] Digital phase-shift interferometer is the mainstream equipment for surface shape detection at present. The dynamic range of the interferometer refers to the maximum surface error and the minimum surface error range that the instrument can measure, and is usually evaluated by the maximum number of oblique fringes that can be measured. The interferometer uses the laser wavelength as the "scale" of detection, which essentially determines its high measurement accuracy, and also determines that its measurement dynamic range is limited to a certain extent. [0003] Optical manufacturing is essentially an iterative process gradually approaching the theoretical surface shape. Each manufacturing stage requires a detection instrument that is compatible with its accuracy and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/023
Inventor 侯溪伍凡万勇建吴永前吴高峰
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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