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TFT-LCD array substrate and manufacturing method thereof

A technology of an array substrate and a manufacturing method, which is applied in the field of TFT-LCD array substrate and its manufacturing, can solve the problems of abnormal signal transmission and signal line corrosion, and achieve the effect of solving the problem of abnormal signal transmission.

Active Publication Date: 2011-03-30
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] The object of the present invention is a TFT-LCD array substrate and its manufacturing method, which can solve the problem that the signal cannot be transmitted normally caused by the corrosion of the signal line

Method used

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  • TFT-LCD array substrate and manufacturing method thereof
  • TFT-LCD array substrate and manufacturing method thereof
  • TFT-LCD array substrate and manufacturing method thereof

Examples

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no. 1 example

[0056] The first embodiment of the manufacturing method of the TFT-LCD array substrate of the present invention includes the following steps:

[0057] Step 1, depositing a conductive film;

[0058] Step 2: forming a pattern of conductive connecting lines at least in the PAD area through a patterning process;

[0059] Step 3: Depositing a metal thin film, forming a signal line pattern through a patterning process, and the signal line pattern overlaps with the conductive connection line pattern.

[0060] Through this embodiment, the conductive connection lines can be formed only in the PAD area, and the conductive connection lines are located below the signal lines. Forming the conductive connecting lines only in the PAD area can avoid problems caused by corroding the signal lines, and will not have any impact on the array area (such as parameters such as the height of the signal line area).

no. 2 example

[0061] The second embodiment of the manufacturing method of the TFT-LCD array substrate of the present invention includes the following steps:

[0062] Step 11: Deposit a metal film, and form a signal line pattern through a patterning process;

[0063] Step 12, depositing a conductive film;

[0064] Step 13: Through a patterning process, a pattern of conductive connection lines is formed at least in the PAD area, and the pattern of the signal lines overlaps with the pattern of the conductive connection lines.

[0065] Through this embodiment, the conductive connection lines can be formed only in the PAD area, and the conductive connection lines are located above the signal lines. Forming the conductive connecting lines only in the PAD area can avoid problems caused by corroding the signal lines, and will not have any impact on the array area (such as parameters such as the height of the signal line area).

no. 3 example

[0066] The third embodiment of the manufacturing method of the TFT-LCD array substrate of the present invention includes the following steps:

[0067] Step 21: sequentially and continuously depositing a conductive film and a metal film;

[0068] Step 22: Etching the metal film and the conductive film to form a signal line pattern through a patterning process.

[0069] In this embodiment, by depositing the metal thin film and the conductive thin film successively (the sequence is irrelevant), the conductive connecting line and the signal line above it can be formed through one patterning process.

[0070] Through this embodiment, although only the conductive connection lines with the same width and length as the signal lines can be formed, compared with the first embodiment and the second embodiment, since one patterning process is omitted, the cost is greatly saved.

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Abstract

The invention discloses a TFT-LCD array substrate and a manufacturing method thereof. The array substrate is provided with a PAD area and comprises a transparent substrate, signal lines and conductive connecting lines, wherein the signal lines are arranged on the transparent substrate; and the conductive connecting lines are at least arranged in the PAD area and attached to the signal lines. Through attaching the conductive connecting lines to the signal lines, the invention solves the problem caused by signal line corrosion that the signals can not be normally transmitted.

Description

technical field [0001] The invention relates to a TFT-LCD array substrate and a manufacturing method thereof, in particular to a TFT-LCD array substrate and a manufacturing method thereof capable of solving the problem that signals cannot be normally transmitted due to corrosion of signal lines. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) is a main flat panel display (Flat Panel Display, FPD for short). [0003] According to the direction of the electric field driving the liquid crystal, the TFT-LCD is divided into a vertical electric field type and a horizontal electric field type. Among them, the vertical electric field TFT-LCD needs to form pixel electrodes on the array substrate and the common electrode on the color filter substrate; however, the horizontal electric field TFT-LCD needs to form the pixel electrodes and common electrodes on the array substrate at the same time. Therefore, when manufacturing the array subst...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1362G02F1/1368H01L21/82H01L21/768
Inventor 朴相镇
Owner BOE TECH GRP CO LTD
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