Method for eliminating edge effect of coated glass

An edge effect and coated glass technology, which is applied in the field of glass manufacturing, can solve problems such as difficult to fix the placement position, different glass specifications, and edge effects that cannot be solved, and achieve the effect of solving edge effects and reducing thickness

Inactive Publication Date: 2011-04-20
吴江南玻华东工程玻璃有限公司
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  • Abstract
  • Description
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Problems solved by technology

However, this method can only be adjusted for fixedly placed glass. If the position of the glass is changed, the edge effect will not be solved.
However

Method used

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  • Method for eliminating edge effect of coated glass
  • Method for eliminating edge effect of coated glass

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Example Embodiment

[0011] Below in conjunction with the embodiment shown in the accompanying drawings, the technical scheme of the present invention is described in detail as follows:

[0012] as attached figure 1 As shown, in the present invention, the magnetron sputtering method is used to deposit the atoms of the target material 3 adsorbed on the magnet 2 on the surface of the glass 1 to form a film layer, which is distributed on the sputtering channel of the target material 3 located above the glass 1. There is argon gas 4, and nitrogen gas 5 is distributed under the glass 1.

[0013] The argon gas 4 in the above-mentioned embodiment can also be selected from other inert gases, and the above-mentioned nitrogen gas 5 can also be replaced by oxygen gas.

[0014] In the above embodiment, without changing the original equipment and method, a process gas (oxygen or nitrogen, etc.) that slows down the sputtering is distributed under the glass, so that the sputtering speed of the edge of the glass...

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Abstract

The invention discloses a method for eliminating the edge effect of coated glass. The method comprises the following steps of: depositing atoms of a target material on the surface of glass by using a magnetron sputtering method; distributing argon on a sputtering channel of the target material, which is arranged above the glass; distributing process gas for slowing sputtering below the glass, wherein the process gas for slowing sputtering can be oxygen or nitrogen. In the invention, on the basis of no change of the original equipment and method, the gas (oxygen or nitrogen, and the like) for slowing sputtering is only distributed below the glass and can enter a sputtering area only from edges of the glass because of the blocking of the glass, and thus, the speed of sputtering at the edges of the glass can be slowed, the thickness of films at the edges can be thinned, and finally the problem of edge effect of the coated glass can be solved.

Description

technical field [0001] The invention relates to a glass manufacturing industry, in particular to a method for solving edge effects when coating glass. Background technique [0002] In the traditional magnetron sputtering coating method, since the distribution of the electric field at the edge of the glass is inconsistent with the distribution in the middle of the glass, the coating on the edge of the glass is 2%-3% thicker than the middle of the glass. The current solution is to fix the position of the glass, and adjust the process gas at the edge of the glass and reduce the opening of the baffle at the edge of the glass. However, this method can only be adjusted for fixedly placed glass, and if the glass is placed in a different position, the edge effect will not be resolved. In the actual production process, the specifications of the glass are different, and its placement position is difficult to fix, so this problem cannot be solved. SUMMARY OF THE INVENTION [0003] ...

Claims

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Application Information

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IPC IPC(8): C23C14/35
Inventor 武瑞军
Owner 吴江南玻华东工程玻璃有限公司
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