Manufacturing process of silicon heterojunction solar battery

Abstract

The invention relates to a manufacturing process of a silicon heterojunction solar battery. The silicon heterojunction solar battery comprises a first electric silicon substrate, a first intrinsic silicon layer, a second intrinsic silicon layer, a second electric silicon layer and a first electric heavily-doping silicon layer, wherein the first intrinsic silicon layer and the second intrinsic silicon layer are respectively formed at two sides of the first electric silicon substrate and forms a heterojunction with the first electric silicon substrate; and the second electric silicon layer and the first electric heavily-doping silicon layer are respectively formed on the first intrinsic silicon layer and the second intrinsic silicon layer. According to the invention, the second electric silicon layer and the first electric heavily-doping silicon layer are formed in an ion implantation way so as to optimize the thicknesses and the doping qualities of the second electric silicon layer and the first electric heavily-doping silicon layer.

Description

technical field [0001] The invention relates to a manufacturing process of a silicon heterojunction solar cell, in particular to a manufacturing process of a silicon heterojunction solar cell that reduces manufacturing costs and improves conversion efficiency. Background technique [0002] With the development of science and technology, the evolution of civilization and the rapid growth of population, the use and consumption of energy is increasing day by day. In the case of limited natural resources such as oil, natural gas and coal, how to save energy and find and develop alternative energy has become one of the most important issues to be solved and cannot be ignored. Since the energy from the sun is large and inexhaustible, the development of solar cells as devices for power generation and storage has gradually become the mainstream in the new century. [0003] A so-called solar cell is a photovoltaic component that converts the sun's energy into electricity. The simpl...

AI Technical Summary

Problems solved by technology

When the film is very thin (such as a few nanometers), it is difficult to form a film by plasma-enhanced chemical vapor deposition. Not only is the concentration of doping difficult to control, but it is also prone to problems of uneven film thickness or failure to form a film in some areas.

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