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40results about How to "Control doping concentration" patented technology

Method for controlling N-type 4H-SiC homogenous epitaxial doping

The invention discloses a method for controlling N-type 4H-SiC homogenous epitaxial doping. The method includes steps of placing silicon carbide substrates into a reaction chamber; heating the reaction chamber in hydrogen stream; adding C<3>H<8> into the hydrogen stream after the temperature of the reaction chamber reaches 1400 DEG C; performing in-situ etching on the substrates for 10-30 minutes after the temperature of the reaction chamber reaches 1580 DEG C; keeping the temperature of the reaction chamber at the temperature of 1580 DEG C, keeping the pressure of the reaction chamber within the range of 300mbar-700mbar, adding SiH<4> at a flow rate of 15-24mL / min, C<3>H<8> at a flow rate of 5-10mL / min and N<2> at a flow rate of 2L / min into the hydrogen stream at a rate of 80L / min and growing epitaxial layers; cooling the silicon carbide substrates in the hydrogen stream after the epitaxial layers complete growing; filling argon into the reaction chamber until the pressure of the reaction chamber reaches the normal pressure. The method has the advantages that only the pressure of the reaction chamber is changed, operation is simple and convenient, and the manufactured silicon carbide epitaxial layers are doped uniformly, have smooth surfaces and can be used for manufacturing silicon carbide devices.
Owner:XIDIAN UNIV

Method for preparing optical fiber quantum probe with controllable diamond particle doping concentration

The invention provides a method for preparing an optical fiber quantum probe with controllable diamond particle doping concentration. The method comprises the following steps of: step 1, mixing a solution with a nano diamond particle aqueous solution containing NV color center; step 2, ultrasonically dissolving the prepared solution doped with the nano diamond particles containing NV color centerby a sol-gel method, sealing and standing, and fully hydrolyzing to form sol-gel; and step 3, uniformly coating the sol-gel prepared in the step 2) on the end surface of the optical fiber, holding theoptical fiber by a stepping motor, contacting the end surface of the optical fiber with the sol-gel for a period of time, pulling at a certain rate to form a hemispherical gel film with a certain thickness and a certain curvature on the end surface, and curing to obtain the prepared optical fiber quantum probe. The method can control the doping concentration of the nano diamond particles containing NV color center, and the mixing is uniform. In addition, the probe has the advantages of convenient manufacturing process and high repeatability, and can realize mass production.
Owner:厦门烽行光电科技有限公司

Cadmium sulfide thin film solar cell and preparation method thereof

The invention belongs to the field of novel energy source materials and devices, in particular relates to a preparation method of a semiconductor film solar cell and provides a CdS homojunction solar cell structure, wherein Cd2SnO4 serves as a transparent conducting layer, n type CdS serves as a window layer, Zn2SnO4 serves as a buffering layer material between the transparent conducting layer and the window layer, and p type CdS serves as an absorbing layer. On the basis of the CdS homojunction solar cell structure, a CdS solar cell is prepared by a dry process. Namely, the preparation method comprises the following steps of: performing radio-frequency sputtering on the borosilicate or aluminosilicate glass to form the transparent conducting layer Cd2SnO4; performing radio-frequency sputtering to form the buffering layer Zn2SnO4; performing radio-frequency sputtering to form the n type CdS serving as the window layer; depositing copper-doped CdS at room temperature through physical gas phase method and performing post treatment to form the p type CdS serving as the absorbing layer; or directly growing the p type copper-doped CdS serving as the absorbing layer at a certain temperature through the physical gas phase method; and depositing a metal electrode and connecting a lead. Through the structure and the process, sun light can be better collected and used; p type doping treatment can be effectively performed on the CdS; influences caused by lattice mismatch and interface state are eliminated; and then higher photoelectric conversion efficiency is achieved.
Owner:SICHUAN UNIV

Solar selective absorbing coating on ceramic substrate surface and preparation method thereof

ActiveCN105783298AControlled Hydrolysis CondensationControl doping concentrationSolar heat devicesCoatingsIonSolvent
Aiming at the defects of high surface emissivity, great thermal radiation loss and the like of a current vanadium-titanium black porcelain coating, the invention provides a solar selective absorbing coating on a ceramic substrate surface and a preparation method thereof. The coating comprises three layers of a vanadium-titanium black porcelain absorbing layer, a silica ion barrier layer and an antimony-doped tin oxide infrared reflecting layer in sequence. The solar selective absorbing coating on the ceramic substrate surface and the preparation method thereof have the advantages that as glycol is used as a coordination stabilizer and a solvent, hydrolytic condensation of antimony ions can be effectively controlled, the antimony ions can be prevented from coagulating due to hydrolysis and thus the doping concentration of the antimony ions is effectively controlled so that the antimony-doped tin oxide infrared reflecting layer reflects infrared radiation between 2.5 microns and 25 microns and has the reflectivity as high as 80% to achieve the purpose of reducing the emissivity of the selective absorbing coating. The solar selective absorbing coating which has an absorptivity of more than 90% and an emissivity of less than 25% can be obtained, and has positive significance for resource recycling of wastes and effective thermal utilization of solar energy.
Owner:GUANGZHOU INST OF ENERGY CONVERSION - CHINESE ACAD OF SCI +1

Ni-doped CuCoMnOx spinel structure solar selective absorption coating and preparation method

The invention discloses a solar selective absorption coating and a preparation method thereof. By preparing a spinel structure ceramic target material in advance and using a Ni target material to be subjected to radio frequency magnetron sputtering on a substrate, the Ni-doped CuCoMnOx spinel structure solar selective absorption coating is prepared. The coating can be applied in a high temperatureenvironment, the binding force between an absorption layer and the substrate can be effectively improved, the coating is prevented from peeling off, and in addition, the doping content of metal elements can be precisely controlled. The two adopted target materials are both connected with radio frequency sources, the two radio frequency sources can work simultaneously and can also work independently. The target distance, the sputtering power and the sputtering time of the two target materials can be separately adjusted as required. When the two target materials simultaneously work, atoms in the two target materials will be sputtered out at the same time, and accordingly, doping can be conducted in situ. The doping concentration is very conveniently controlled by adjusting the target distance and the sputtering power of the doping target.
Owner:广州珈鹏科技有限公司

Preparation method of nanometer silver/antimony doped tin oxide composite transparent conductive heat reflection coating

ActiveCN105860605AEffective control of doping concentrationEffective control of infrared reflection starting pointCoatingsMicrometerSolvent
The invention provides a preparation method of a nanometer silver/antimony doped tin oxide composite transparent conductive heat reflection coating. Ethylene glycol is adopted as a solvent and a coordination stabilizer in the preparation process of antimony doped tin oxide sol, hydrolysis and condensation of antimony ions can be effectively controlled, and therefore the doping concentration of the antimony ions is effectively controlled; in addition, when the antimony doped tin oxide sol and nanometer silver sol are mixed, nanometer silver will not be coagulated, and therefore effective doping of nanometer silver is achieved. The method specially comprises the following steps that the nanometer silver sol and the antimony doped tin oxide sol are prepared at first, then mixed sol is prepared, and finally, deposition is carried out on a substrate through a spraying technology to obtain the nanometer silver/antimony doped tin oxide composite transparent conductive heat reflection coating. The surface resistance of the coating prepared through the method reaches 20 or below, the infrared heat reflection rate reaches 80% or above, and the infrared reflection initial point can be adjusted from 2.5 micrometers to 1.5 micrometers so as to be applicable to different application occasions.
Owner:GUANGZHOU INST OF ENERGY CONVERSION - CHINESE ACAD OF SCI

Device for regulating and controlling thin film material growth through substrate electrification

The invention discloses a device for regulating and controlling the thin film material growth through substrate electrification. The device is characterized in that on the basis of the existing CVD (chemical vapor deposition) reaction device, a substrate electrification system is added; the substrate electrification system comprises a conducting circuit, a metal pole plate, a plug and a power supply; the metal pole plate is positioned in a CVD reaction cavity; the plug and the power supply are positioned outside the CVD reaction cavity; the metal pole plate is connected with the plug and the power supply through the conducting circuit. By using the device, positive and negative static charges or current can be exerted on the conducting substrate; an insulation substrate is polarized, so that electrostatic charges can be controllably generated at the surface; the goal of regulating and controlling the electric potential, the adsorbability, the electron energy state and the catalytic activity of the freely grown substrate is achieved. By using device and the growth method, the monocrystal size, the uniformity, the doping concentration, the layer number, the interlayer stacking mode,the twist angle, the chirality, the cleanliness and the like can be conveniently controlled in the thin film material preparation process.
Owner:PEKING UNIV

A kind of preparation method of pedot:pss base flexible ammonia gas sensor

The invention discloses a preparation method of a PEDOT:PSS (poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate)) based flexible ammonia sensor, which comprises the steps of preparing PEDOT:PSS into ink suitable for printing on an ordinary ink-jet printer, depositing an ammonia sensitive material layer on an interdigital electrode in an ink-jet printing manner, printing a ferric chloride aqueous solution on the ammonia sensitive material layer in an ink jet manner, and performing deposition to form a doping material to accomplish preparation of the ammonia sensor. The prepared ammonia sensor has better response to ammonia at different concentrations, is highly sensitive to the low-concentration ammonia and wide in detection range and has the characteristics of short response time, highstability and good gas selectivity; a lower detection limit of the ammonia reaches 1ppm; the sensor is suitable for highly sensitive detection of the ammonia at the room temperature; and the preparedammonia sensor is good in flexibility and low in working temperature, and can be combined with wearable equipment to be applied to the ammonia detection in a surrounding environment of a human body and detection of human body breathing gas so as to give an early warning for a human health condition.
Owner:中科微感(宁波)科技有限公司

Method for manufacturing double diffusion type optical avalanche diode with incident light on back surface by adopting epitaxial equipment

The invention relates to a method for manufacturing a double diffusion type optical avalanche diode with incident light on a back surface by adopting epitaxial equipment. MOCVD epitaxial equipment is used for carrying out epitaxial treatment once on an avalanche photodiode on an indium phosphide substrate; a double diffusion method of the MOCVD epitaxial equipment is used for doping; a sputteringmethod is used for manufacturing a P-surface electrode; the substrate is thinned and polished; a wet corrosion method is used for manufacturing a light incidence window and an anti-reflection layer; the sputtering method is used for manufacturing a N-surface electrode; and the N-surface electrode is alloyed. By using the double diffusion method, in the diffusion process, the invention realizes gradient doping of different regions and different concentration by controlling the flow rate of a diffusion source; and an abrupt junction is formed in diffusion. The invention has good diffusion uniformity and high rate of finished products of pieces; and the manufactured avalanche photodiode with incident light on the back surface has the characteristics of small dark current, high sensitivity, small series resistance, high reliability and the like.
Owner:WUHAN HUAGONG GENUINE OPTICS TECH CO LTD

A kind of Zn in-situ doped p-type hexagonal boron nitride thin film and preparation method thereof

The invention provides a Zn in-situ doping P type hexagonal boron nitride film and a preparation method thereof, and belongs to the technical field of semiconductor material preparation and semiconductor doping. According to the method, a high-purity hBN target, a high-purity Zn target and a cleaned substrate are put into a magnetron sputtering growth chamber; a radio frequency magnetron double-target co-sputtering technology is used; Zn impurities are doped in situ in the hBN film growth process; after the growth completion, the film is subjected to in-situ annealing in the N2 atmosphere; thefilm is cooled to the chamber temperature under the N2 gas protection, so that the Zn in-situ doping P type hBN film is obtained on the substrate. The method is simple; the cost is low; safety and reliability are realized; the toxicity and harm do not exist; the doping concentration can be controlled through regulating the target distance and the sputtering power of the Zn target; the B atom lattice point position can be easily occupied by Zn in the hBN film and has the lower forming energy and smaller impurity activation energy as the substituting impurities, so that the Zn doping P type hBNfilm with lower resistivity can be obtained; the performance is stable.
Owner:JILIN UNIV
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