Magnetic levitation vibration isolation platform

A vibration isolation platform and magnetic levitation technology, applied in non-rotational vibration suppression and other directions, can solve the problems of no fixed frequency, active vibration isolation, etc., and achieve the effects of good vibration isolation effect, easy control and simple structure

Inactive Publication Date: 2012-09-26
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortcomings of the existing natural frequency in the existing vibration isolation platform, the present invention proposes a magnetic suspension vibration isolation platform without fixed frequency and active vibration isolation

Method used

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specific Embodiment approach 1

[0041] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT 1. The static load-bearing unit of the magnetic suspension vibration isolation platform described in this embodiment includes a static load-bearing unit mover and a static load-bearing unit stator, and the static load-bearing unit mover includes a first excitation component, a load-bearing platform 1 and a load-bearing support frame, the first excitation component is fixed below the load-bearing platform through the load-bearing support frame, and the permanent magnet in the first excitation component is magnetized in parallel in the vertical direction;

[0042] The static load-bearing unit stator includes a second excitation component, a support base 10 and a support frame, the second excitation component is fixed above the support base through the support frame, and the permanent magnets in the second excitation component are magnetized in parallel in the vertical direction;

[0043] The first excitation part and the sec...

specific Embodiment approach 2

[0045] Specific implementation mode two, see figure 1 This embodiment will be described. This embodiment is a further limitation on the structure of the first excitation component and the second excitation component used in the magnetic suspension vibration isolation platform described in the first embodiment. In this embodiment, the first excitation component includes a first excitation The permanent magnet 2 on the part and the permanent magnet 4 under the first excitation part, the load-bearing support frame is composed of the permanent magnet fixing plate 3 of the first excitation part and the load-bearing support column 5, the permanent magnet 4 under the first excitation part and the first excitation part The upper permanent magnets 2 have the same shape and are all ring-shaped. The upper permanent magnet 2 of the first excitation part and the lower permanent magnet 4 of the first excitation part are symmetrically pasted and fixed on the upper surface and the lower surfa...

specific Embodiment approach 3

[0048] Specific implementation mode three, see figure 2 This embodiment will be described. This embodiment is a further limitation on the structure of the first excitation component and the second excitation component used in the magnetic suspension vibration isolation platform described in the first embodiment. In this embodiment, the first excitation component includes a first excitation The permanent magnet 2 on the part and the permanent magnet 4 under the first excitation part, the load-bearing support frame is composed of the permanent magnet fixing plate 3 of the first excitation part and the load-bearing cylinder 5, the permanent magnet 4 under the first excitation part and the upper part of the first excitation part The permanent magnets 2 have the same shape and are all ring-shaped. The permanent magnet fixing plate 3 of the first exciting part is ring-shaped. The upper permanent magnet 2 of the first exciting part and the lower permanent magnet 4 of the first excit...

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Abstract

The invention discloses a magnetic levitation vibration isolation platform, relating to the technical field of a magnetic levitation vibration isolation platform. Through the invention, the shortcoming that the existing vibration isolation platform has a natural frequency is overcome. In the vibration isolation platform disclosed by the invention, a static bearing unit comprises a rotor and a stator; the primary level of a Z-direction adjustment unit is formed by coaxially connecting multiple circular coils in series sequentially along the Z direction, and the secondary level is in a bilateral structure; and an X-direction adjustment unit comprises a primary level and a secondary level. The rotors of multiple static bearing units, the secondary level of the Z-direction adjustment unit, the secondary level of the X-direction adjustment unit and the secondary level of the Y-direction adjustment unit are fixed on the bottom surface of a moving substrate; the stators of multiple static bearing units, the primary level of the Z-direction adjustment unit, the primary level of the X-direction adjustment unit and the primary level of the Y-direction adjustment unit are fixed on a fixed substrate; and the planes of the moving substrate and the fixed substrate are parallel to each other, and an air gap exists between the two. The magnetic levitation vibration isolation platform disclosed by the invention easily forms a large magnetic levitation vibration isolation platform, has simple structure and high vibration isolation precision, is easy to control and can be applied to vacuum environment.

Description

technical field [0001] The invention relates to the technical field of magnetic suspension vibration isolation platforms. Background technique [0002] With the continuous development of science and technology, in some technical fields, such as aerospace, and precision optical systems, the processing accuracy of some key parts is required to be higher and higher, thus requiring precision and ultra-precision processing technology. In precision and ultra-precision machining, the accuracy of the equipment itself is of course crucial, but the impact of environmental vibration on machining accuracy and surface quality cannot be ignored. Environmental vibration will not only cause the vibration of the machine tool body, but more importantly, it will generate relative vibration displacement between the cutting tool and the workpiece to be processed, which will be directly reflected on the precision and surface quality of the processed parts. Therefore, it is very necessary to set ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16F15/03
Inventor 寇宝泉周一恒罗俊张赫张鲁
Owner HARBIN INST OF TECH
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