Vaporization apparatus and method for controlling the same

Abstract

Disclosed are a vaporization apparatus and a control method for the same. The vaporization apparatus includes a vaporization crucible adapted to receive a raw material; a vaporization heating unit adapted to vaporize the raw material by heating the vaporization crucible; a temperature measuring unit adapted to measure temperature of the vaporization crucible; a power measuring unit adapted to measure an applied power of the vaporization heating unit; and a control unit adapted to control a vaporization quantity of the raw material based on any one of a temperature variation value of the temperature measuring unit and a power variation value of the power measuring unit. The vaporization apparatus uses a non-contact / electronic method which measures a vaporization quantity through a temperature variation value and a power variation value during vaporization of a raw material. Therefore, since, differently from a contact method, a vaporization quantity measuring unit does not directly contact a raw material gas, various raw materials can be supplied and large quantity raw material supply or long time raw material supply can be achieved without deterioration of the function. In addition, preciseness of the raw material supply may be enhanced since the electronic method is capable of precise measurement of the vaporization quantity.

Description

technical field [0001] The present invention relates to a vaporization apparatus (vaporization apparatus) and a control method thereof, and more specifically, to a vaporization apparatus capable of supplying raw materials in a vaporized state (ie, in a gas state) and a control method thereof. Background technique [0002] Generally, when the raw material is a solid or a liquid, the vacuum heating vapor deposition method is accompanied by the process of vaporizing the raw material. For this purpose, a raw material vaporizer is provided inside or outside a chamber. The raw material vaporization device generally includes a vaporization unit and a vaporization control unit, the vaporization unit is used to vaporize a solid or liquid raw material, and the vaporization control unit is used to measure a quantity of a raw material to be vaporized and according to Adjust a vaporization amount to a desired value based on the measured value. [0003] The vaporization amount control u...

AI Technical Summary

Problems solved by technology

[0006] Therefore, the above-mentioned vaporization amount control method according to the related art is not suitable for the following latest processes: a process that needs to supply various raw materials to form a heterogeneous film (heterogeneous); Processes that require long-term supply of raw materials to ensure productivity, and processes that require precise supply of raw materials according to the scaling down of the process

Images