Special tool for installing wafer bracket and method for installing special tool

A technology of special tools and installation methods, applied in metal material coating process, ion implantation plating, gaseous chemical plating and other directions, can solve the problem of inaccurate positioning efficiency of wafer exchange, etc., achieve simple structure and operation, installation and maintenance Convenient and easy-to-use effects

Active Publication Date: 2013-09-18
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention mainly solves the technical problem of inaccurate positioning and low efficiency of the position of the wafer exchange on the existing bracket, and provides a special tool for installing the wafer bracket with simple structure, convenient operation, accurate positioning and high efficiency. its installation method

Method used

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  • Special tool for installing wafer bracket and method for installing special tool
  • Special tool for installing wafer bracket and method for installing special tool
  • Special tool for installing wafer bracket and method for installing special tool

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Embodiment

[0015] refer to Figure 1-4 , a special tool for installing a wafer carrier, comprising a wafer carrier mounting frame 3, a mounting frame handle 1 is arranged on the wafer carrier mounting frame 3, and the mounting frame handle 1 is fixed on the wafer by bolts 5 3 on the round bracket mount. A positioning pin 4 is provided at the center of the above-mentioned wafer bracket mounting frame 3 , and the bolt 2 is threadedly connected with the wafer bracket mounting frame 3 .

[0016] In the installation method of the above-mentioned special tool for installing the wafer bracket, the positioning pin 4 is first passed through the wafer mounting plate 9, and the bracket mounting frame 3 and the wafer mounting plate 9 are positioned to ensure concentricity. After positioning, the four bolts 2 are connected to the wafer mounting plate 9 The four holes on the round mounting disc 9 are aligned and screwed and fixed. At this time, the wafer mounting disc 9 and the bracket mounting frame...

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PUM

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Abstract

The invention discloses a special tool for installing a wafer bracket and a method for installing the special tool and belongs to the technical field of semiconductor film deposition devices. The technical problems that the exchanging position of wafers in existing brackets cannot be accurately positioned and the efficiency is low are solved. The special tool for installing the wafer bracket comprises a wafer bracket installation rack, wherein an installation rack handle is arranged on the wafer bracket installation rack and the installation rack handle is fixed on the wafer bracket installation rack through bolts. A positioning pin is arranged in the center of the wafer bracket installation rack and bolts are in threaded connection with the wafer bracket installation rack. The method comprises that the positioning pin penetrates through a wafer installation disk, the wafer installation disk and the wafer bracket installation rack are positioned to guarantee that the wafer installation disk and the wafer bracket installation rack share the same center, the wafer installation disk and the wafer bracket installation rack are fixed, the wafer bracket installation rack is placed in a circular groove of a loadlock chamber, the wafer bracket installation rack and the loadlock chamber are fixed after alignment, finally bolts are screwed off, and the wafer bracket installation rack is taken down. By the aid of the special tool and the method, the installation is time-saving and convenient, and wafers can be positioned precisely.

Description

technical field [0001] The invention relates to a special tool for installing a wafer bracket and an installation method thereof, to be precise, a new type of special tool for installing a wafer bracket and an installation method thereof capable of realizing accurate positioning of wafers in a vacuum loading chamber. The invention belongs to the technical field of semiconductor thin film deposition equipment. Background technique [0002] The principle of thin film deposition technology is to place the wafer in a vacuum environment, inject an appropriate amount of reactive gas, and use the physical changes and chemical reactions of the gas to form a solid film on the surface of the wafer. During the whole process of gas thin film deposition, the switching of wafer from atmospheric pressure and vacuum state in EFEM is carried by Loadlock Chamber. [0003] In the existing technology related to the wafer mounting rack, the position of the wafer exchange on the bracket cannot b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/44C23C14/50
Inventor 姜崴芦佳
Owner PIOTECH CO LTD
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