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Glass processing method

A processing method and glass technology, which is applied in photosensitive material processing, photoplate process of patterned surface, optics, etc., can solve problems such as deterioration of yield, reduction of strength, and easy occurrence of cracks, and achieve excellent resolution and peelability, The effect of high etching resistance

Active Publication Date: 2013-01-30
TOKYO OHKA KOGYO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the past, although physical methods were generally used as processing methods for such glass substrates, there were problems that cracks easily occurred during processing, strength decreased, and yield deteriorated.

Method used

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Experimental program
Comparison scheme
Effect test

Embodiment 1～8、 comparative example 1～6

[0165] According to the formulation (units are parts by mass) described in Table 1, the alkali-soluble resin having phenolic hydroxyl group, the compound containing quinonediazide group, polyvinyl alkyl ether and organic solvent were mixed to prepare Examples 1-4 positive photosensitive resin composition.

[0166] In addition, according to the formulation (unit: parts by mass) recorded in Table 2, an alkali-soluble resin having a phenolic hydroxyl group, a crosslinking agent, an acid generator, a polyvinyl alkyl ether, and an organic solvent were mixed to prepare examples 5- 8 negative photosensitive resin composition.

[0167] Furthermore, according to the formula (unit: parts by mass) recorded in Table 3, alkali-soluble resin, polymerizable monomer, radical polymerization initiator, silane coupling agent, inorganic filler and organic solvent were mixed to prepare Comparative Examples 1-6 negative photosensitive resin composition.

[0168] Details of each component in Table...

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PUM

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Abstract

The invention provides a glass processing method which uses photosensitive resin composition with high etching resistance and resolution and excellent in releasability. The method comprises: a process of forming a coating film of the photosensitive resin composition containing alkali-soluble resin with a phenolic hydroxyl group; an exposure process for selectively exposing the coating film; a developing process for developing the exposed coating film to form resin patterns; an etching process for etching the glass substrate by using the resin patterns as a masking; and a stripping process for striping the resin patterns.

Description

technical field [0001] The present invention relates to a glass processing method for etching a glass substrate using a resin pattern obtained by patterning a photosensitive resin composition as a mask. Background technique [0002] The touch panel is constituted by forming a film of a transparent conductive material such as ITO on the opposing surfaces of a glass substrate and a thin film material facing each other through a spacer. On this touch panel, the contact position of the thin film material is detected as coordinate information. [0003] In addition, recently, a touch panel-integrated liquid crystal display has also been proposed. This is a display in which one of the two glass substrates constituting the liquid crystal display also serves as the glass substrate of the touch panel, and is very effective in reducing the thickness and weight of the display. [0004] Conventionally, physical methods have been generally used as processing methods for such glass subst...

Claims

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Application Information

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IPC IPC(8): G03F7/00G03F7/004
CPCC03C15/00G03F7/26G03F7/032G03F7/022
Inventor 植松照博
Owner TOKYO OHKA KOGYO CO LTD