Method used for implementing two-stage mixing optimized batch processing scheduling and based on variable time window

Abstract

The invention provides a method used for implementing two-stage mixing optimized batch processing scheduling and based on a variable time window. According to the method, a decomposition rule of a complex problem is used, an aim of smallest total weighting delaying time is achieved, and two-stage mixing control is implemented. A first stage comprises the steps of based on a multi-rule combined self-adaptive principle, establishing a real-time control platform, adopting a variable time window rolling time domain method to obtain real-time parameters of patch combination and the like. A second stage comprises the steps of based on a flabby method, establishing a flabby linear integer mathematical model, obtaining a solution through a combined engineer of .NET and ILOG CPLEX commercialized software, and obtaining optimized order of batch sequencing. According to the two stages, lot grouping and sequencing for lot grouping in the batch scheduling problem are respectively solved, a multi-entrance property of a batch processor is considered, and according to the variable time window rolling time domain method, a dynamic state real-time scheduling property of machined work piece batches is met. According to the method used for implementing the two-stage mixing optimized batch processing scheduling and based on the variable time window, scheduling accuracy and operating time of a central processing unit (CPU) are considered in a comprehensive mode, real-time optical scheduling of a reentrant next batch processor can be achieved, and the method is beneficial to being popularized and applied in semiconductor field and the like.

Description

Technical field [0001] The invention relates to a control method for batch production process scheduling, in particular to a method for implementing two-stage hybrid optimization batch scheduling based on a variable time window. Background technique [0002] In semiconductor chip manufacturing, scheduling of batch processors in the furnace tube area is a typical NP-hard problem in scheduling and control, which restricts the overall performance of the semiconductor manufacturing system. Carrying out research on reasonable scheduling control of batch processors is very important for improving semiconductor The performance of the chip production line is of great significance. [0003] At present, for batch production process scheduling, there is a contradiction between the scheduling accuracy and the running time of the scheduling algorithm. For example, the heuristic algorithm can solve large-scale NP-hard problems and obtain feasible solutions within a reasonable time, but th...

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Problems solved by technology

[0004] Aiming at the technical problems existing in the above-mentioned prior art, the present invention provides a method for implementing two-level hybrid optimal batch processing scheduling based on variable time windows, which overcomes the low precision or scheduling problems of multi-entry semiconductor batch processing machine production process scheduling. Shortcomings such as the long running time of the algorithm, and the problem that the multi-entry feature increases the difficulty of scheduling

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