LED (light-emitting diode) chip ITO (indium tin oxide) evaporator explosion-proof visible window
A technology of LED chip and evaporation machine, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., which can solve the problem of narrow visual range, impact burst of infrared optical crystal, and inability to fully understand the situation of evaporation machine and other problems, to increase the observation range, prevent breakage, and reduce the failure rate
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[0017] Such as figure 1 , 2 , 3, the present invention includes a vapor deposition machine body 1, a rotating frame 2 is arranged in the vapor deposition machine body 1, a plating pot 3 is arranged on the rotating frame 2, an LED chip is arranged on the plating pot 3 through a spring clip, and the rotating frame 2 Connected to the drive motor 5 through the rotating shaft 4, the output shaft 51 of the driving motor 5 is connected to the rotating shaft 4 through the coupling 6, the rotating frame 2 is connected to the guide rail 8 through the turntable 7, and the evaporation machine body 1 is also provided with a visible window 9, The visible window 9 includes a mounting seat 91, an infrared optical crystal 92, and an explosion-proof plate 95. The infrared optical crystal 92 and the explosion-proof plate 95 are connected to the evaporation machine body 1 through the mounting seat 91, and the explosion-proof plate 95 is located inside the infrared optical crystal 92. The inner s...
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