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Physical quantity sensor and electronic apparatus

A technology of physical quantity sensor and moving electrode, which is applied in the direction of instruments, measuring devices, measuring acceleration, etc., and can solve the problem of reduced sensitivity of acceleration sensor

Inactive Publication Date: 2013-10-23
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, for example, torsion may occur on the movable body and the sensitivity of the acceleration sensor may decrease.

Method used

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  • Physical quantity sensor and electronic apparatus
  • Physical quantity sensor and electronic apparatus
  • Physical quantity sensor and electronic apparatus

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Embodiment Construction

[0045] Hereinafter, preferred embodiments of the present invention will be described in detail using the drawings. In addition, the embodiment described below does not unduly limit the content of the present invention described in the claims. In addition, not all the configurations described below are necessarily essential configuration requirements of the present invention.

[0046] 1. Physical quantity sensor

[0047] First, a physical quantity sensor according to the present embodiment will be described with reference to the drawings. figure 1 It is a plan view schematically showing the physical quantity sensor 100 according to this embodiment. figure 2 is a schematic representation of the physical quantity sensor 100 according to this embodiment, along figure 1 The sectional view of the line II-II. In addition, in figure 1 and figure 2 In , an X axis, a Y axis, and a Z axis are shown as three mutually orthogonal axes.

[0048] The physical quantity sensor 100 can...

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Abstract

A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis.

Description

technical field [0001] The invention relates to a physical quantity sensor and electronic equipment. Background technique [0002] In recent years, a physical quantity sensor that detects a physical quantity using, for example, silicon MEMS (Micro Electro Mechanical System) technology has been developed. [0003] A physical quantity sensor includes, for example, a fixed electrode fixed to a substrate, and a movable electrode disposed opposite to the fixed electrode with a gap therebetween, and detects a physical quantity such as acceleration based on an electrostatic capacitance between the fixed electrode and the movable electrode. . [0004] For example, Patent Document 1 discloses an acceleration sensor including a movable body supported by two supporting parts (fixed parts) and having a frame member and a movable electrode. [0005] However, in the acceleration sensor described in Patent Document 1, both ends of the movable body are supported by two fixed portions. Th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
CPCG01P15/125G01P2015/0814G01P15/0802
Inventor 田中悟
Owner SEIKO EPSON CORP