Unlock instant, AI-driven research and patent intelligence for your innovation.

Leakage Detection Device

A detection device and technology for liquid leakage, applied in gas/liquid distribution and storage, pipeline systems, mechanical equipment, etc., can solve the problem of inability to effectively detect whether there is liquid leakage in the transfer box, and avoid gas sealing. Effect

Active Publication Date: 2016-01-27
SHANGHAI HUALI MICROELECTRONICS CORP
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the above existing problems, the present invention discloses a liquid leakage detection device to overcome the gas seal phenomenon in the prior art when the leakage liquid enters the pipeline, resulting in no liquid under the pipeline, so that it is impossible to effectively detect whether the transfer box is There is a problem with leakage

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Leakage Detection Device
  • Leakage Detection Device
  • Leakage Detection Device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Such as Figure 1-3 As shown, the present embodiment relates to a liquid leakage detection device, which is applied to the liquid leakage detection of the pipes that transmit the chemical liquid to the machine 6. Usually, there are multiple pipes that transmit the chemical liquid. The device of this embodiment It includes: a transfer box 1 sheathed outside these pipelines for transporting chemical liquid, a casing connected to the bottom opening of the transfer box 1 and a sensor 4 arranged outside the casing. Such as figure 1 with figure 2 As shown, the casing includes a bottom-sealed pipeline 2 and a branch pipe 3 arranged inside the pipeline 2. The branch pipe 3 has an exhaust function, and the centerline of the branch pipe 3 coincides with the centerline of the pipeline 2. One end of the branch pipe 3 extends The top opening of the pipeline 2, the bottom of the branch pipe 3 is higher than the bottom of the pipeline 2, that is, the bottom of the branch pipe 3 and...

Embodiment 2

[0036] Such as Figure 4 with Figure 5 As shown, this embodiment is roughly the same as Embodiment 1, and the centerlines of the branch pipe 3 and the pipeline 2 do not coincide specifically, that is, the branch pipe 3 can be arranged at the position near the inner wall of the pipeline 2. In this embodiment , the space of the branch pipe 3 of the pipeline 2 is divided into two areas, the larger left area formed by the left outer wall of the branch pipe 3 and the left inner wall of the pipeline 2, and the right outer wall of the branch pipe 3 and the right inner wall of the pipeline 2. The smaller right side area of ​​the transfer box 1, the opening is located on the right side of the bottom of the transfer box 1, when the liquid in the pipeline leaks, the liquid moves from the left side to the right opening at the bottom of the transfer box 1, and the leaking liquid in the transfer box 1 It can flow into the larger left area of ​​the pipeline 2 from the left side of the bott...

Embodiment 3

[0038] Such as Image 6 As shown, this embodiment is roughly the same as Embodiment 1, and the specific improvement is that the transfer box is provided with N bushings, where N is a natural number greater than or equal to 1. In this embodiment, the transfer box is provided with three bushings and correspondingly equipped with three sensors, which can increase the accuracy of liquid leakage detection.

[0039] From the above two embodiments, it can be seen that when there is leakage in the transfer box, it flows into the pipeline through the opening at the bottom of the transfer box. Since the pipeline is equipped with a branch pipe with the function of guiding air, it prevents the leak from entering the pipeline. The gas seal phenomenon of the pipeline, the sensor outside the pipeline senses the change inside the pipeline, and activates the alarm device, so that the leakage problem can be dealt with in time, avoiding the occurrence of large-scale leakage. The leakage detectio...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a leaked liquid detection device which is applied to detecting leaked liquid of a pipeline for transmitting chemical liquid to a drilling crew. The leaked liquid detection device comprises a transit box, a sleeve and a sensor, wherein the transit box is sleeved on the pipe, and an open hole is formed in the bottom of the transit box; the sleeve is arranged at the bottom of the transit box, is communicated with the open hole and comprises a channel and a branch pipe arranged in the channel, the bottom of the channel is sealed, and one end of the branch pipe extends out of the top opening of the channel; the sensor is arranged outside the sleeve. According to the leaked liquid detection device, the branch pipe with an air guide function is arranged in the channel at the bottom of the transit box, therefore, air seal caused by leaked liquid entering the channel is effectively avoided, and detection accuracy on the leaked liquid is high. Furthermore, the leaked liquid detection device is simple in process and strong in practicability.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a liquid leakage detection device. Background technique [0002] At present, in order to facilitate the transmission, there are several pipelines in the transfer box supplied from the factory side to the equipment side in the factory, leading to the machine side. The pipelines in the transfer box sometimes leak chemical liquid, and chemical liquid is usually corrosive. , Sometimes the leakage phenomenon may cause a large area of ​​leakage due to failure to be discovered and dealt with in time, and sometimes even cause damage to the equipment, resulting in greater losses. In order to solve this problem, a hole is opened at the bottom of the transfer box and a bottom-sealed pipeline is installed at the opening, and a sensor is installed outside the pipeline to form a leakage detection device to detect the leakage inside the transfer box. , when a liquid leak oc...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): F17D5/02
Inventor 任存生苏亚青金见安张旭升张传民文静李阳柏
Owner SHANGHAI HUALI MICROELECTRONICS CORP