Chlorosilane Purification Method
A purification method, chlorosilane technology, applied in the direction of halosilane, halide silicon compound, etc., can solve the problems of high energy consumption in the purification process, and achieve the effects of improving core competitiveness, reducing energy consumption, and achieving obvious effects
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Embodiment 1
[0082] Same process image 3 , the tower feed volume is 20m 3 / h, the feed composition is as follows: the mass content of trichlorosilane is 98%, silicon tetrachloride and dichlorodihydrosilane are both 1%, and metal impurities such as B, P, and Fe are trace amounts.
[0083] The raw material first enters the first rectification tower T1, and the material flow is from the first rectification tower T1 to the fifth rectification tower T5, wherein the pressures of the first rectification tower T1 to the fifth rectification tower T5 increase sequentially.
[0084] The top pressure and temperature of the first rectification tower are 0.25MPa (absolute pressure) and 54.9°C respectively, ensuring that the cooling source of the top of the first rectification tower (that is, the tower with the lowest pressure) is circulating water; the fifth rectification tower The temperature of the bottom of the tower should be lower than 120°C, to ensure that the heat source of the fifth rectificat...
Embodiment 2
[0090] Same process Figure 4 , the tower feed volume is 20m 3 / h, the feed composition is as follows: the mass content of trichlorosilane is 98%, silicon tetrachloride and dichlorodihydrosilane are both 0.1%, and metal impurities such as B, P, and Fe are trace amounts.
[0091] The raw material first enters the fifth rectification tower T5, and the material flow is from the fifth rectification tower T5 to the first rectification tower T1, wherein the pressure from the fifth rectification tower T5 to the first rectification tower T1 decreases sequentially.
[0092] The top pressure and temperature of the first rectification tower are 0.25MPa (absolute pressure) and 54.9°C respectively, ensuring that the cooling source of the top of the first rectification tower (that is, the tower with the lowest pressure) is circulating water; the fifth rectification tower The temperature of the bottom of the tower should be lower than 120°C, to ensure that the heat source of the fifth recti...
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