Multi-electrode microsensor for detecting copper metal vapor concentration
A micro-sensor, multi-electrode technology, applied in instruments, measuring devices, scientific instruments, etc., can solve the problems of rough results, no consideration of ablation, difficult practical application, etc., to facilitate installation, reduce initial voltage, and reduce operation difficulty. Effect
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[0027] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.
[0028] see figure 1 , discloses a kind of multi-electrode miniature sensor for detecting copper metal vapor concentration according to the specific embodiment of the present invention, and it comprises from bottom to top:
[0029] A discharge cathode, the discharge cathode includes a metal discharge needle array 4, the discharge cathode is grounded, and a strong electric field is generated in a local small area of the metal discharge needle tip to field-emit electrons to realize the ionization of the measured ga...
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