High-spatial-resolution laser spectral-pupil confocal spectrum-mass spectrum microscopic imaging method and device
A high spatial resolution, microscopic imaging technology, applied in measurement devices, analytical materials, material excitation analysis, etc., can solve the problems of long imaging time of mass spectrometry, low spatial resolution of mass spectrometry detection, drift, etc., to overcome focal plane impurities. Astigmatism interference, improved spatial resolution, strong anti-stray light effect
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Embodiment 1
[0049] like figure 2 In the shown high spatial resolution laser split pupil confocal spectrum-mass spectrometer imaging device, the compressed focusing spot system 4 is replaced by a vector beam generating system 25 and a pupil filter 26 . The D-shaped illumination collector mirror 5 can be replaced by a circular illumination collector mirror 27 .
[0050] like figure 2 The shown high spatial resolution laser split pupil confocal spectrum-mass spectrometer imaging device includes a point light source 1, a collimator lens 2 placed along the direction of the incident optical axis 8, a vector beam generating system 25, a pupil filter 26 and a focusing spot To the circular illumination pupil 28 of the circular illumination collection mirror 27 of the tested sample 9, also includes the circular collection pupil 29 of the circular illumination collection mirror 27, the collection lens 13 located in the collection optical axis 12 direction and the collection lens 13 light intensi...
Embodiment 2
[0070] like image 3 In the high spatial resolution laser split pupil confocal mass spectrometer imaging device shown, the point light source 1 is replaced by a pulse laser 32, a condenser lens 33, and a light-transmitting optical fiber 34 at the focal point of the condenser lens 30, and the compressed focusing spot system 4 is composed of The vector beam generating system 25 and the pupil filter 26 are replaced. The D-shaped illuminating collecting mirror 5 is replaced by a circular illuminating collecting mirror 27 . At the same time, an exit beam attenuator 30 is introduced into the laser focusing system, and a detection beam attenuator 31 is introduced into the laser split pupil confocal detection system.
[0071] The radially polarized light longitudinal field tight focusing system composed of the vector beam generating system 25, the pupil filter 26 and the circular illumination pupil 28 of the circular illumination collecting mirror 27 is used to compress the lateral s...
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