Variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope

Abstract

The present invention discloses a variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope, relates to a tuning-fork-type micromechanical gyroscope, and belongs to the field of micro electro mechanical system (MEMS). The variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope includes a glass substrate and a metal electrode; and further comprises a MEMS structure, the MEMS structure can fully use variable area detection comb differential capacitances in a space structure to increase the arrangement number of the variable area detection comb differential capacitances in a limited space. Modal optimization of a detection mode can be realized by connection of an anchor point and a coupled rhombus beam, and modal optimization of a drive mode can be realized by connection of the anchor point and a lever. A U-shaped beam can be used to reduce puadrature coupling error brought by dimension error caused by processing technology defects. The variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope can realize the modal optimization of the drive mode and the detection mode, can realize the linear conversion of detection capacitance variation and displacement variation under the premise of no reducing of the sensitivity, can effectively solve the small measuring range problem of a varied spacing capacitance microgyroscope, and can reduce the quadrature coupler error.

Description

technical field [0001] The invention discloses a tuning fork micro-mechanical gyroscope with variable area capacitive dual-mode optimization, relates to a tuning fork micro-mechanical gyroscope, especially relates to a variable-area capacitive dual-mode optimized tuning fork micro-mechanical gyroscope, which belongs to the micro-electromechanical system (MEMS) technology field. Background technique [0002] Micromechanical gyroscopes are developing rapidly and have been widely used in the electronics industry, automobiles, inertial navigation and other fields, thanks to their advantages of small size, low cost, low energy consumption and mass production. The working principle of the vibrating micromachined gyroscope is based on the Coriolis effect, which uses the energy transfer between the driving mode and the detection mode to be sensitive to changes in angular velocity. [0003] With the continuous improvement of the performance (resolution, sensitivity, bandwidth) of th...

AI Technical Summary

Problems solved by technology

However, for the direct-coupled tuning fork gyro, regardless of the driving mode or the detection mode, the frequency of the in-phase mode is smaller than the frequency of the anti-phase mode, and the frequency difference between the two is difficult to increase

In order to reduce vibration sensitivity, the anti-phase ...

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