an atomic generator

A generator and atom technology, which is applied in the direction of phonon exciter, maser, accelerator, etc., can solve the problems of angular distribution and density control of atoms that cannot be exported, and achieve improved atom utilization, high insulation requirements, and improved Effect of divergence angle distribution
CN105430864BActive Publication Date: 2017-12-12HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Publication Date
2017-12-12

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Abstract

The invention discloses an atom generator comprising a vacuum flange, a gas introducing module, a heating module, a heat insulation module, a cooling module and an outlet module. The gas introducing module comprises a gas supply source, a vacuum micro-adjusting valve and a gas supply tube. The heating module comprises a power supply, a tungsten capillary and tungsten heating elements. The heat insulation module comprises a molybdenum heat insulation layer which is fixedly installed on the vacuum flange. The cooling module comprises a cooling sleeve which sleeves the molybdenum heat insulation layer. The outlet module comprises an outlet support which is arranged below the tungsten capillary. The outlet support is fixedly installed on the tungsten heat insulation layer and is provided with a conical internal hole. The center line of the conical internal hole and the center line of the tungsten capillary are collinear, and the diameter of the top end of the center line is less than that of the bottom end. The output support with the conical internal hole is additionally arranged at an atom outlet so that flux density of atoms at a small polar angle can be increased, flux density of the atoms at a large polar angle can be suppressed, angular distribution of atomic beams at the outlet can be improved and atom utilization rate can be enhanced.
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Description

technical field

[0001] The present invention belongs to the field of atomic generators. Background technique

[0002] The atomic generator is mainly used in the field of surface science and thin film technology, and can be used for thin film preparation, material surface cleaning, surface nitriding, oxidation and other treatments, and can also be used for atomic and molecular physics research.

[0003] Chinese Patent Publication No. CN201410411357.9 discloses a polycapillary-based hydrogen atom generation device for splitting hydrogen into hydrogen atoms. The device includes a plurality of adjacent metal capillaries, and metal heating coils are arranged outside the metal capillaries. And turn on the high-frequency alternating current to generate a high-speed alternating magnetic field, so that the metal capillary in the magnetic field will generate countless eddy currents under the action of electromagnetic induction. into a hydrogen atom. The device mainly cracks hydrogen...

Claims

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