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A reconstructed double-spoke MEMS multi-ring gyroscope with low thermoelastic damping

ActiveCN116753931Bchange temperatureChange the heat flux distributionSpeed measurement using gyroscopic effectsGyroscopes/turn-sensitive devicesGyroscopeHeat flux
This invention discloses a low thermoelastic damping reconstructed double-spoke MEMS multi-ring gyroscope, belonging to the field of microelectromechanical systems (MEMS). This MEMS multi-ring gyroscope has a fully symmetrical structure in a plane, consisting of a central fixed anchor point, multiple concentric rings, spokes, and electrodes. The central fixed anchor point is circular, fixed by an external structure, and shares the same center with the multiple concentric rings. The innermost concentric ring is connected to the anchor point via spokes. The multiple concentric rings are connected by spokes, and the width of the concentric rings can be adjusted as needed, with varying spacing between the rings. The spoke structure includes single straight spokes, double straight spokes, and reconstructed double straight spokes. Spokes of the same ring are evenly distributed circumferentially, with the axes of adjacent rings differing by 22.5°. The outermost ring is connected to the first ring from the outside in by a single straight spoke, the innermost ring is connected to the anchor point by double straight spokes, and the remaining rings are connected by reconstructed double straight spokes. This gyroscope features a unique reconfigured double spoke design that extends the heat transfer path to reduce heat transfer at the spokes, thereby altering the internal temperature and heat flux distribution of the gyroscope; reducing the thermoelastic damping of the device; improving the gyroscope's sensitivity; and reducing zero-bias instability.
Owner:NORTHWESTERN POLYTECHNICAL UNIV