This invention discloses a low thermoelastic damping reconstructed double-
spoke MEMS multi-ring
gyroscope, belonging to the field of
microelectromechanical systems (MEMS). This MEMS multi-ring
gyroscope has a fully symmetrical structure in a plane, consisting of a central fixed
anchor point, multiple concentric rings, spokes, and electrodes. The central fixed
anchor point is circular, fixed by an external structure, and shares the same center with the multiple concentric rings. The innermost
concentric ring is connected to the
anchor point via spokes. The multiple concentric rings are connected by spokes, and the width of the concentric rings can be adjusted as needed, with varying spacing between the rings. The
spoke structure includes single straight spokes, double straight spokes, and reconstructed double straight spokes. Spokes of the same ring are evenly distributed circumferentially, with the axes of adjacent rings differing by 22.5°. The outermost ring is connected to the first ring from the outside in by a single straight
spoke, the innermost ring is connected to the anchor point by double straight spokes, and the remaining rings are connected by reconstructed double straight spokes. This
gyroscope features a unique reconfigured double spoke design that extends the
heat transfer path to reduce
heat transfer at the spokes, thereby altering the
internal temperature and
heat flux distribution of the gyroscope; reducing the thermoelastic damping of the device; improving the gyroscope's sensitivity; and reducing zero-bias
instability.