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This invention discloses a vacuum distillation apparatus and method for isophthaloyl / terephthaloyl chloride, belonging to the field of chemical separation technology. The distillation apparatus and process provided by this invention prevent terephthaloyl chloride from entering the vacuum system, thus protecting the vacuum system: due to the stepped cooling of the first-stage and second-stage cup coolers, the terephthaloyl chloride is fully condensed and recovered before entering the vacuum system. The Roots pump and ejector pump in the vacuum system only handle non-condensable gases, avoiding rotor jamming caused by material condensation and accumulation.