Method for Improving Gas Sensitivity of Metal Oxide Sensors by Programmed Cooling
An oxide and sensor technology, applied in the direction of material resistance, can solve the problems of limited application, unusable, low sensitivity, etc., to achieve the effect of improving sensitivity, ensuring repeatability, and improving sensitive activity
Active Publication Date: 2018-09-04
WUHAN CUBIC OPTOELECTRONICS
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Problems solved by technology
At present, most commercial metal oxide gas sensors work at a constant temperature and have good sensitivity to ppm-level organic gases and inorganic gases, but are less sensitive to lower concentration levels (ppb-level) gases , cannot be used in many high-precision detection fields, which limits its application
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[0023] Choose Pt-SnO 2 As a metal oxide gas sensor, it detects 100ppm CO and H 2 , Acetone and ethanol. Set the parameters of variable temperature: working temperature is 400℃, program cooling rate is 10℃ / s, low temperature is 40℃. According to the above-mentioned embodiment, the sensitivity is obtained through a program cooling method. At the same time, the current common commercial metal oxide gas sensor test method (400° C.) is used to obtain the sensitivity, and the two are compared to reflect the beneficial effects of the present invention. The results of the comparison are shown in Table 1. It can be clearly seen that for Pt-SnO 2 The metal oxide gas sensor detects organic / inorganic gases through the program cooling method, and the sensitivity obtained is much greater than that obtained by the constant working temperature method.
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Abstract
The invention discloses a method for improving the gas sensitivity of a metal oxide sensor. According to the method, in a clean background atmosphere, the metal oxide gas sensor is stabilized at a specific work temperature (200 to 400 DEG C); then, the temperature reduction speed is set to be a specific speed in a range being 1 to 50 DEG C / s; the programmed temperature reduction is performed to reach the specific low temperature (room temperature to 200 DEG C); a change curve R<air>-T of the resistance of the sensor along with the temperature is obtained and is used as a substrate signal; in the detection gas atmosphere, the same flow process is used for controlling the temperature of the sensor to obtain a change curve R<Gas>-T of the resistance of the sensor along with the temperature, which is used as a response signal; the substrate signal is divided by the response signal to obtain an R<air> / R<Gas>-T curve; the maximum value max (R<air> / R<Gas>) on the curve is taken to be used as the sensitivity degree on the gas. Under the condition of not changing the ingredients of metal oxide materials, compared with a constant-work-temperature test method, the method has the advantages that the sensitive activity of the gas sensor is greatly improved, and the gas sensitivity is improved, so that the high-precision detection of low-concentration stage (ppb stage) gas is realized.
Description
Technical field [0001] The invention belongs to a gas sensing technology, relates to the sensitivity of a metal oxide gas sensor, and specifically refers to a method for improving the gas sensitivity of a metal oxide sensor. Background technique [0002] Metal oxide gas sensors have been widely used due to their low cost, mature process, good sensitivity and stability, and compatibility with semiconductor processes. At present, most commercial metal oxide gas sensors work at a constant temperature, and have good sensitivity to ppm-level organic and inorganic gases, but they are less sensitive to lower concentration levels (ppb level) gases. , Cannot be used in many high-precision detection fields, which limits its application. Summary of the invention [0003] In order to overcome the above-mentioned shortcomings of the prior art, the present invention provides a method for improving the gas sensitivity of a metal oxide sensor; the present invention can greatly improve the sensit...
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IPC IPC(8): G01N27/12
CPCG01N27/12
Inventor 张顺平雷涛谢长生
Owner WUHAN CUBIC OPTOELECTRONICS
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