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Method for improving gas sensitivity of metal oxide sensor through programmed temperature reduction

A sensor and oxide technology, applied in the direction of material resistance, can solve the problems of low sensitivity, limited application, inability to use, etc., to achieve the effect of improving sensitive activity, improving sensitivity, and ensuring repeatability

Active Publication Date: 2016-04-20
WUHAN CUBIC OPTOELECTRONICS
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Problems solved by technology

At present, most commercial metal oxide gas sensors work at a constant temperature and have good sensitivity to ppm-level organic gases and inorganic gases, but are less sensitive to lower concentration levels (ppb-level) gases , cannot be used in many high-precision detection fields, which limits its application

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  • Method for improving gas sensitivity of metal oxide sensor through programmed temperature reduction
  • Method for improving gas sensitivity of metal oxide sensor through programmed temperature reduction
  • Method for improving gas sensitivity of metal oxide sensor through programmed temperature reduction

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example

[0023] Choose Pt-SnO 2 As a metal oxide gas sensor, detect 100ppm of CO, H 2 , acetone and ethanol. Set the parameters of variable temperature: the working temperature is 400°C, the program cooling rate is 10°C / s, and the low temperature is 40°C. According to the above-mentioned implementation manner, the sensitivity is acquired through the method of temperature programming. At the same time, the method of testing at a constant working temperature (400° C.) commonly used in commercial metal oxide gas sensors is used to obtain the sensitivity, and the two are compared to reflect the beneficial effects of the present invention. The results of the comparison are shown in Table 1, and it can be clearly seen that for Pt-SnO 2 The metal oxide gas sensor detects organic / inorganic gases through the method of program cooling, and the sensitivity obtained by the method of constant working temperature is far greater than that obtained by the method of constant working temperature.

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Abstract

The invention discloses a method for improving the gas sensitivity of a metal oxide sensor. According to the method, in a clean background atmosphere, the metal oxide gas sensor is stabilized at a specific work temperature (200 to 400 DEG C); then, the temperature reduction speed is set to be a specific speed in a range being 1 to 50 DEG C / s; the programmed temperature reduction is performed to reach the specific low temperature (room temperature to 200 DEG C); a change curve R<air>-T of the resistance of the sensor along with the temperature is obtained and is used as a substrate signal; in the detection gas atmosphere, the same flow process is used for controlling the temperature of the sensor to obtain a change curve R<Gas>-T of the resistance of the sensor along with the temperature, which is used as a response signal; the substrate signal is divided by the response signal to obtain an R<air> / R<Gas>-T curve; the maximum value max (R<air> / R<Gas>) on the curve is taken to be used as the sensitivity degree on the gas. Under the condition of not changing the ingredients of metal oxide materials, compared with a constant-work-temperature test method, the method has the advantages that the sensitive activity of the gas sensor is greatly improved, and the gas sensitivity is improved, so that the high-precision detection of low-concentration stage (ppb stage) gas is realized.

Description

technical field [0001] The invention belongs to the gas sensitive technology, relates to the sensitivity of a metal oxide gas sensor, and specifically refers to a method for improving the gas sensitivity of a metal oxide sensor. Background technique [0002] Metal oxide gas sensors have been widely used due to their low cost, mature technology, good sensitivity and stability, and compatibility with semiconductor technology. At present, most commercial metal oxide gas sensors work at a constant temperature and have good sensitivity to ppm-level organic gases and inorganic gases, but are less sensitive to lower concentration levels (ppb-level) gases , cannot be used in many high-precision detection fields, which limits its application. Contents of the invention [0003] In order to overcome the deficiencies of the above-mentioned prior art, the present invention provides a method for improving the gas sensitivity of metal oxide sensors; the present invention can greatly imp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/12
Inventor 张顺平雷涛谢长生
Owner WUHAN CUBIC OPTOELECTRONICS
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