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Diaphragm pump

A diaphragm pump and diaphragm technology, applied in the direction of pumps, pump components, variable displacement pump components, etc., can solve the problem of easily damaging the quantitative quality of liquid delivery of the diaphragm pump, and achieve the effect of inhibiting the reduction of quantitative quality.

Active Publication Date: 2018-01-02
NIPPON PILLAR PACKING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the quantitative performance of the liquid delivery amount of the diaphragm pump is easily impaired.

Method used

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  • Diaphragm pump
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Experimental program
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Effect test

no. 1 approach

[0064] exist figure 1 A side sectional view of the diaphragm pump 1 according to the first embodiment of the present invention is shown in . exist figure 2 A partially enlarged side sectional view of the diaphragm pump 1 is shown in .

[0065] Such as figure 1 , figure 2 As shown, the diaphragm pump 1 has a housing 2 , a piston 3 , a shaft 4 , a roll-up diaphragm 5 , a driving device 6 , a guiding member 7 , and a limiting mechanism 8 . In the present embodiment, the diaphragm pump 1 is arranged such that the longitudinal direction (axial direction) is the vertical direction.

[0066] In this embodiment, the housing 2 has a cylinder body 11 and a cylinder head 12 . The cylinder 11 is formed in a cylindrical shape and arranged with the axial direction as the vertical direction. The cylinder 11 is made of stainless steel such as Japanese SUS304. A vent hole 14 is provided on the cylinder body 11 , and the vent hole 14 penetrates in a direction perpendicular to or inters...

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PUM

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Abstract

A diaphragm pump is provided that can effectively suppress a quantitative decrease in the liquid delivery volume caused by the operation of the rolling diaphragm. A diaphragm pump (1) has a housing (2), a piston (3), a shaft (4), and a roll-up diaphragm (5) configured such that a cover (35) reciprocates integrally with the piston. The rotational motion of the motor part (30) is converted into linear motion and output from the output shaft (31) to the drive device, guide member (7), and restriction mechanism (8) of the shaft. The guide member is disposed on the other side of the piston in the axial direction of the housing, is installed in the housing, and can guide the movement of the shaft in the axial direction. The limiting member is provided between the guide member and the shaft in the housing (2), can allow the shaft to reciprocate in the direction of the axis, and can limit the rotation of the shaft around the axis. .

Description

technical field [0001] The present invention relates to a diaphragm pump with a rolling diaphragm. Background technique [0002] Conventionally, a diaphragm pump described in, for example, Patent Document 1 is known as a diaphragm pump used for supplying a liquid such as a chemical solution in the manufacturing process of semiconductors, liquid crystals, organic EL, solar cells, and LEDs. [0003] This diaphragm pump has: a cylinder body (casing); a piston housed in the cylinder body and capable of reciprocating movement in the direction of its axis; a roll-up type diaphragm that operates according to the reciprocation movement of the piston; The actuator (drive unit) has a motor unit and an output shaft composed of a threaded shaft connected to the piston so as to function as a piston rod. [0004] The linear actuator is configured to be mounted on the cylinder, convert the rotational motion of the motor unit into a linear motion and output it from the output shaft to the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B43/02F04B43/04
CPCF04B39/044F04B43/02F04B53/146F04B53/16F05B2210/11F04B53/10F04B53/14F04B53/144F04B53/147
Inventor 手岛一清成尾元彰
Owner NIPPON PILLAR PACKING CO LTD