Non-evaporable type adsorption pump utilizing electric heating activation

Abstract

The invention discloses a non-evaporable type adsorption pump utilizing electric heating activation, and belongs to the field of vacuum obtaining and maintaining. The adsorption pump comprises an adsorption unit, a heater and a mounting interface; the adsorption unit is composed of an adsorption belt and an adsorption material attached on the adsorption belt; the mounting interface is a vacuum sealed hollow structure; an electric connector is arranged in a cavity of the mounting interface; the adsorption unit and the heater are arranged in a spaced manner, and the adsorption unit abuts against the heater; and a heating element of the heater is electrically connected to the electric connector in the mounting interface. According to the adsorption pump disclosed by the invention, the adsorption unit and the heater are arranged in the spaced manner, so that the adsorption material is in sufficient contact with a hating tube, and therefore, time for reaching a needed activation temperature is short, heating power loss is low and efficiency is high.

Description

technical field [0001] The invention relates to a non-evaporative adsorption pump, which belongs to the field of vacuum acquisition and maintenance. Background technique [0002] A vacuum system requires high vacuum conditions in the transmission path of high-energy ion beams to reduce beam losses. The system now uses a built-in liquid nitrogen cryogenic condensation pump to pump out a large amount of water vapor to achieve the required vacuum degree. However, it was found during the test that when the high-energy ion beam is working, a large amount of gas will be generated due to high heat and ionization. Especially hydrogen, cannot maintain the original vacuum degree. The survey found that the non-evaporable getter is an effective way to solve the instantaneous large amount of gas, especially hydrogen, but most of the existing non-evaporable getters on the market are made into the structure of the getter sheet installed on the heating tube. The block suction piece is a g...

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Problems solved by technology

The system now uses a built-in liquid nitrogen cryogenic condensation pump to pump out a large amount of water vapor to achieve the required vacuum degree. However, it was found during the test that when the high-energy ion beam is working, a large amount of gas will be generated due to high heat and ionization. Especially hydrogen, unable to maintain the original vacuum

The survey found that the non-evaporable getter is an effective way to solve the instantaneous large amount of gas, especially hydrogen, but most of the existing non-evaporable getters on the market are made into the structure of the getter sheet installed on the heating tube. The block suction piece is a group to form a commercial adsorption pump cavity, which is packaged in a vacuum chamber. Additional installation space is required for installation. The effective suction area cannot be directly installed in the part that needs to be pumped, and cannot be condensed with the existing low temperature Pump coupling installation

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