A device capable of exciting a specified area on the surface of mems microstructure and its exciting method

Abstract

The invention discloses a device capable of exciting a designated area on the surface of a MEMS microstructure and a method thereof. The device includes a substrate on which four manual three-axis displacement stages, an ultrasonic probe unit, a laser unit, and a shielding plate are arranged. and the microstructure unit are sequentially installed on four manual three-axis translation stages; the ultrasonic probe unit includes a probe mounting plate, and a point-focused air-coupled ultrasonic probe is arranged on the probe mounting plate; the laser unit includes a fixed plate and a rotating plate, and the rotating plate is set There are first and second manual angular displacement stages, and the second manual angular displacement stage is equipped with a laser; a conical hole is provided on the shielding plate, and a small-diameter microhole is provided in the center of the bottom surface of the conical hole; the MEMS microstructure of the microstructure unit The side of the microhole close to the baffle; the point-focused air-coupled ultrasonic probe, the laser, the baffle and the MEMS microstructure are arranged in sequence. The advantage is that it can excite a specified area on the microstructure surface with a small size, and can improve the signal-to-noise ratio of the detected vibration response signal of the microstructure.

Description

Technical field [0001] The invention belongs to the technical field of micro-mechanical electronic systems, and in particular relates to a device capable of exciting a designated area on the surface of a MEMS microstructure and an exciting method thereof. Background technique [0002] Because MEMS micro-devices have the advantages of low cost, small size and light weight, they have broad application prospects in many fields such as automobiles, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the small displacements and small deformations of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of the amplitude, natural frequency, damping ratio and other dynamic characteristics of these microstructures has become the development of MEMS products. important content. [0003] In order to test the dynamic characteristic parameters of the mic...

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