Shock wave exciting device for performing non-contact underwater excitation on MEMS microstructure

Abstract

The invention discloses a shock wave exciting device for performing non-contact underwater excitation on an MEMS microstructure. The shock wave exciting device comprises a base plate, two electric sliding tables are symmetrically arranged on the base plate, a water tank unit and a pedestal are arranged between the two electric sliding tables, needle electrode units are symmetrically mounted on the electric sliding tables respectively through manual double-shaft displacement tables, and the needle electrode units are respectively suspended in a tank body of the water tank unit; a microstructure unit is mounted on the pedestal and is suspended in the tank body of the water tank unit; needle electrodes of the two needle electrode units are respectively electrically connected with two electrodes of a high-voltage capacitor, and a first air switch is arranged between the high-voltage capacitor and one needle electrode; and the two electrodes of the high-voltage capacitor are respectively electrically connected with the positive electrode and the negative electrode of a high-voltage power supply, and on / off of such connection is controlled by a second air switch. The shock wave exciting device can not only excite the MEMS microstructure under water, but also avoid interference of vibration response of a base structure on test results, thereby achieving non-contact excitation on the MEMS microstructure and having good excitation effect.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a shock wave excitation device for non-contact underwater excitation of MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS micro devices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. In addition, the dynamic characteristic test of MEMS microstructure needs to take into accou...

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Problems solved by technology

However, the working principle of this device is to use the shock wave generated by the needle electrode and the plate electrode to discharge in the air to excite the microstructure, so it cannot be used to excite the MEMS microstructure in water. In addition, the device uses an elastic base The excitation method excites the MEMS microstructure, so when the dynamic characteristics of the MEMS microstructure are tested by the non-contact optical vibration measurement method, the vibration response signal obtained will inevitably include the vibration response of the elastic base structure , which will make it very difficult to obtain the dynamic characteristic parameters of the MEMS microstructure

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